Observation of Crystalline Contrast with Using Low Energy Electrons in SEM
Kikuchi, N, Shinzawa, T, Negishi, T, Ogura, K, Nielsen, C
Published in Microscopy and microanalysis (01.08.2007)
Published in Microscopy and microanalysis (01.08.2007)
Get full text
Journal Article
3-D Process Simulation of CMOS Inverter Based on Selete 65nm Full Process
Fujinaga, M., Itoh, S., Mochiduki, M., Uchida, T., Ishikawa, H., Takenaka, M., Park, C.J., Asada, S., Shinzawa, T., Namekata, J., Wakahara, S., Wada, T.
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
Published in 2006 International Conference on Simulation of Semiconductor Processes and Devices (01.09.2006)
Get full text
Conference Proceeding
New molecular compound precursor for aluminum chemical vapor deposition
Shinzawa, Tsutomu, Uesugi, Fumihiko, Nishiyama, Iwao, Sugai, Kazumi, Kishida, Shunji, Okabayashi, Hidekazu
Published in Applied organometallic chemistry (01.01.2000)
Published in Applied organometallic chemistry (01.01.2000)
Get full text
Journal Article
Titanium-containing hydrofluoric acid pretreatment for aluminum chemical vapor deposition
Sugai, Kazumi, Okabayashi, Hidekazu, Kishida, Shunji, Shinzawa, Tsutomu
Published in Thin solid films (01.07.1996)
Published in Thin solid films (01.07.1996)
Get full text
Journal Article
Aluminum metallization using a combination of chemical vapor deposition and sputtering
SUGAI, K, KISHIDA, S, SHINZAWA, T, OKABAYASHI, H, YAKO, T, KADOKURA, H, ISEMURA, M, KOBAYASHI, T, HOSOKAWA, N
Published in Journal of the Electrochemical Society (01.03.1997)
Published in Journal of the Electrochemical Society (01.03.1997)
Get full text
Journal Article
Optical-Optical Double-Resonance Spectroscopy of Cl2: Analyses of the 0+u, 1u, and 2u(3P2) Ion-Pair States
Ishiwata, T., Shinzawa, T., Si, J.H., Obi, K., Tanaka, I.
Published in Journal of molecular spectroscopy (01.08.1994)
Published in Journal of molecular spectroscopy (01.08.1994)
Get full text
Journal Article
Coagulation factor responsiveness in nephrogenic diabetes insipidus
Ohzeki, Takehiko, Sunaguchi, Mayumi, Tsunei, Mikio, Shinzawa, Takeshi, Hanaki, Keiichi, Shiraki, Kazuo, Shishido, Hiroko
Published in The Journal of pediatrics (01.10.1988)
Published in The Journal of pediatrics (01.10.1988)
Get full text
Journal Article
Barrier layerless submicron aluminum-damascene interconnection using aluminum chemical vapor deposition with a new nucleation method
Shinzawa, Tsutomu, Sugai, Kazumi, Hayashi, Yoshihiro, Nakajima, Tsutomu, Kishida, Shunji, Okabayashi, Hidekazu, Tsunenari, Kinji, Murao, Yukinobu, Kobayashi, Akiko, Yako, Tadaaki
Published in Electronics & communications in Japan. Part 2, Electronics (1996)
Published in Electronics & communications in Japan. Part 2, Electronics (1996)
Get full text
Journal Article
An analysis of the F'(0u+) ion-pair state of I2 by optical-optical double resonance
ISHIWATA, T, TOKUNAGA, A, SHINZAWA, T, TANAKA, I
Published in Journal of molecular spectroscopy (01.05.1986)
Published in Journal of molecular spectroscopy (01.05.1986)
Get full text
Journal Article
Growth process of thin chemical vapor deposition-aluminum films and its underlayer dependence-real-time monitoring of reflected light intensity at the depositing surface
Kobayashi, Akiko, Sekiguchi, Atsushi, Okada, Osamu, Hosokawa, Naokichi, Sugai, Kazumi, Kishida, Shyunji, Okabayashi, Hidekazu, Shinzawa, Tsutomu, Yako, Tadaaki, Kadokura, Hidekimi
Published in Electronics & communications in Japan. Part 2, Electronics (01.12.1995)
Published in Electronics & communications in Japan. Part 2, Electronics (01.12.1995)
Get full text
Journal Article
A spectroscopic study of the D(0u+) ion-pair state of Br2 by the optical-optical double-resonance technique
ISHIWATA, T, TOKUNAGA, A, SHINZAWA, T, TANAKA, I
Published in Journal of molecular spectroscopy (01.12.1984)
Published in Journal of molecular spectroscopy (01.12.1984)
Get full text
Journal Article