100-V Class Two-step-oxide Field-Plate Trench MOSFET to Achieve Optimum RESURF Effect and Ultralow On-resistance
Kobayashi, Kenya, Kato, Hiroaki, Nishiguchi, Toshifumi, Shimomura, Saya, Ohno, Tetsuya, Nishiwaki, Tatsuya, Aida, Kikuo, Ichinoseki, Kentaro, Oasa, Kohei, Kawaguchi, Yusuke
Published in 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD) (01.05.2019)
Published in 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD) (01.05.2019)
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Conference Proceeding
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control
Kato, Hiroaki, Nishiguchi, Toshifumi, Shimomura, Saya, Miyashita, Katsura, Kobayashi, Kenya
Published in IEEE transactions on semiconductor manufacturing (01.08.2021)
Published in IEEE transactions on semiconductor manufacturing (01.08.2021)
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Journal Article
Mechanism and Control Technique of Wafer Warpage in Process Integration for Trench Field Plate Power MOSFET
Kato, Hiroaki, Nishiguchi, Toshifumi, Shimomura, Saya, Miyashita, Katsura, Kobayashi, Kenya
Published in IEEE transactions on semiconductor manufacturing (01.11.2019)
Published in IEEE transactions on semiconductor manufacturing (01.11.2019)
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Journal Article
SEMICONDUCTOR DEVICE
KACHI TAKESHI, NISHIWAKI TATSUYA, KATO HIROO, SHIMOMURA SAYA, MIYASHITA KATSURA
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
Patent
Quality Control of Trench Field Plate Power MOSFETs by Correlation of Trench Angle and Wafer Warpage
Kato, Hiroaki, Nishiguchi, Toshifumi, Shimomura, Saya, Miyashita, Katsura, Kobayashi, Kenya
Published in 2020 International Symposium on Semiconductor Manufacturing (ISSM) (15.12.2020)
Published in 2020 International Symposium on Semiconductor Manufacturing (ISSM) (15.12.2020)
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Conference Proceeding
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
KATO HIROO, SHIMOMURA SAYA, TOMITA KOTA, KISHIMOTO HIROYUKI, NISHIGUCHI TOSHIFUMI
Year of Publication 29.07.2021
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Year of Publication 29.07.2021
Patent
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
KATO HIROO, YOSHIDA YASUSHI, SHIMOMURA SAYA, KAWAI YASUHIRO, INADA MITSURO, BABA SHOTARO
Year of Publication 15.09.2022
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Year of Publication 15.09.2022
Patent