Proximity effect correction for electron beam lithography : Highly accurate correction method
KAMIKUBO, T, ABE, T, TOJO, T, OOGI, S, ANZE, H, SHIMIZU, M, ITOH, M, NAKASUGI, T, TAKIGAWA, T, IIJIMA, T, HATTORI, Y
Published in Japanese Journal of Applied Physics (01.12.1997)
Published in Japanese Journal of Applied Physics (01.12.1997)
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Conference Proceeding
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High-Speed Convolution System for Real-Time Proximity Effect Correction
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Published in Japanese Journal of Applied Physics (01.12.1998)
Published in Japanese Journal of Applied Physics (01.12.1998)
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Knowledge Required for Articles: The Items to Be Included in Case Reports and Observational Study Articles
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Published in The Japanese Journal of Dysphagia Rehabilitation (30.04.2020)
Published in The Japanese Journal of Dysphagia Rehabilitation (30.04.2020)
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TEMPLATE, IMPRINT METHOD, AND IMPRINT DEVICE
SATO TAKASHI, SANHONGI AKIKO, SUDO TAKESHI, YAMADA AKIKO, SHIMIZU MITSUKO
Year of Publication 24.08.2017
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Year of Publication 24.08.2017
Patent
High-Accuracy Proximity Effect Correction for Mask Writing
Abe, Takayuki, Hattori, Yoshiaki, Iijima, Tomohiro, Anze, Hirohito, Oogi, Susumu, Kamikubo, Takashi, Tsuchiya, Seiichi, Shimizu, Matsuki, Kazuto, Inoue, Hideo, Tojo, Takigawa, Tadahiro
Published in Japanese Journal of Applied Physics (01.02.2007)
Published in Japanese Journal of Applied Physics (01.02.2007)
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Imprint method, imprint apparatus, and template
Shimizu, Mitsuko, Yamada, Akiko, Sato, Takashi, Mimotogi, Akiko, Suto, Takeshi
Year of Publication 22.09.2020
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Year of Publication 22.09.2020
Patent
A Rehabilitation of a patient with severe dysphagia caused by traumatic brain injury in the chronic phase: from nasogastric tube feeding to oral feeding
SHIMIZU, Mitsuko, TSUJI, Tetsuya, DOMEN, Kazuhisa, LIU, Meigen, KANEKO, Yoshihiro
Published in The Japanese Journal of Dysphagia Rehabilitation (20.12.1997)
Published in The Japanese Journal of Dysphagia Rehabilitation (20.12.1997)
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Journal Article
IMPRINT METHOD, IMPRINT APPARATUS, AND TEMPLATE
SUTO, Takeshi, SHIMIZU, Mitsuko, MIMOTOGI, Akiko, YAMADA, Akiko, SATO, Takashi
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
Patent