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TANAKA, Hideyuki, SHIMAYAMA, Tsutomu, TAKAGI, Akitsuna, HAMACHI, Chugen, KANO, Tatsuya, MURAOKA, Ryoma, YAGI, Keiichi
Year of Publication 02.08.2024
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Year of Publication 02.08.2024
Patent
LIGHT-EMITTING ELEMENT AND DISPLAY DEVICE
HIKICHI, Kunihiko, SHIMAYAMA, Tsutomu, NISHIKAWA, Tomotaka, SAKAI, Yuuki
Year of Publication 06.05.2021
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Year of Publication 06.05.2021
Patent
Super-low-k SiOCH film (k = 1.9) with extremely high water resistance and thermal stability formed by neutral-beam-enhanced CVD
Yasuhara, Shigeo, Sasaki, Toru, Shimayama, Tsutomu, Tajima, Kunitoshi, Yano, Hisashi, Kadomura, Shingo, Yoshimaru, Masaki, Matsunaga, Noriaki, Samukawa, Seiji
Published in Journal of physics. D, Applied physics (17.02.2010)
Published in Journal of physics. D, Applied physics (17.02.2010)
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Journal Article
LOW DIELECTRIC CONSTANT INSULATING FILM AND FORMATION METHOD THEREFOR
TAJIMA, KUNITOSHI, YASUHARA, SHIGEO, SAMUKAWA, SEIJI, KADOMURA, SHINGO, MATSUNAGA, NORIAKI, SHIMAYAMA, TSUTOMU, YANO, HISASHI, YOSHIMARU, MASAKI
Year of Publication 14.04.2011
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Year of Publication 14.04.2011
Patent