Etch-Byproduct Pore Sealing for Atomic-Layer-Deposited-TaN Deposition on Porous Low-k Film
Furuya, Akira, Soda, Eiichi, Shimada, Miyoko, Ogawa, Shinichi
Published in Japanese Journal of Applied Physics (01.10.2005)
Published in Japanese Journal of Applied Physics (01.10.2005)
Get full text
Journal Article
Structural Studies of High-Performance Low-k Dielectric Materials Improved by Electron-Beam Curing
Yoda, Takashi, Nakasaki, Yasushi, Hashimoto, Hideki, Fujita, Keiji, Miyajima, Hideshi, Shimada, Miyoko, Nakata, Rempei, Kaji, Naruhiko, Hayasaka, Nobuo
Published in Japanese Journal of Applied Physics (01.01.2005)
Published in Japanese Journal of Applied Physics (01.01.2005)
Get full text
Journal Article
PHOTODETECTOR, PHOTODETECTION SYSTEM, LIDAR DEVICE, AND MOBILE BODY
SASAKI KEITA, SUZUKI KAZUHIRO, SHIMIZU MARIKO, SHIMADA MIYOKO, KWON HONAM
Year of Publication 24.02.2023
Get full text
Year of Publication 24.02.2023
Patent
SEMICONDUCTOR DEVICE MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PARTICLE BEAM IRRADIATING DEVICE
HIGASHI KAZUYUKI, YAMAGUCHI HITOMI, MORITA HIROFUMI, MATSUMOTO HIROSHI, SHIMADA MIYOKO, OBARA KEI, SHIMOOKA YOSHIAKI, GOSHIMA YOSHIKUNI
Year of Publication 26.08.2022
Get full text
Year of Publication 26.08.2022
Patent
SEMICONDUCTOR LIGHT EMITTING DEVICE
KOJIMA, Akihiro, AKIMOTO, Yosuke, TOMIZAWA, Hideyuki, SHIMADA, Miyoko, FURUYAMA, Hideto, SUGIZAKI, Yoshiaki
Year of Publication 14.09.2017
Get full text
Year of Publication 14.09.2017
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
KOJIMA AKIHIRO, TOMIZAWA HIDEYUKI, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 02.03.2017
Get full text
Year of Publication 02.03.2017
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 23.02.2017
Get full text
Year of Publication 23.02.2017
Patent
SEMICONDUCTOR LIGHT EMISSION DEVICE
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 23.09.2016
Get full text
Year of Publication 23.09.2016
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
KOJIMA AKIHIRO, TOMIZAWA HIDEYUKI, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 25.04.2016
Get full text
Year of Publication 25.04.2016
Patent
SEMICONDUCTOR LIGHT EMITTING DEVICE
KOJIMA AKIHIRO, TOMIZAWA HIDEYUKI, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 07.01.2016
Get full text
Year of Publication 07.01.2016
Patent
SEMICONDUCTOR LIGHT EMISSION DEVICE
KOJIMA AKIHIRO, TOMIZAWA HIDEYUKI, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 03.12.2015
Get full text
Year of Publication 03.12.2015
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
KOJIMA AKIHIRO, FURUYAMA HIDETO, TOMIZAWA HIDEYUKI, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 03.12.2015
Get full text
Year of Publication 03.12.2015
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 01.10.2015
Get full text
Year of Publication 01.10.2015
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMOJUKU YUKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 07.05.2015
Get full text
Year of Publication 07.05.2015
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMOJUKU YUKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 07.05.2015
Get full text
Year of Publication 07.05.2015
Patent
SEMICONDUCTOR LIGHT-EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME
KOJIMA AKIHIRO, TOMIZAWA HIDEYUKI, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, SHIMADA MIYOKO, AKIMOTO YOSUKE
Year of Publication 19.03.2015
Get full text
Year of Publication 19.03.2015
Patent
SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD FOR MANUFACTURING SAME
TOMIZAWA HIDEYUKI, KOJIMA AKIHIRO, FURUYAMA HIDETO, SUGIZAKI YOSHIAKI, MUKAIDA HIDEKO, SHIMADA MIYOKO, ENDO MITSUYOSHI, AKIMOTO YOSUKE
Year of Publication 19.03.2015
Get full text
Year of Publication 19.03.2015
Patent