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Year of Publication 30.04.2019
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Control Method and Control Program for Focused Ion Beam Device
WATANABE, Keiji, MINE, Toshiyuki, MORISHITA, Masatoshi, SHICHI, Hiroyasu
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Year of Publication 13.09.2018
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CONTROL METHOD AND CONTROL PROGRAM FOR FOCUSED ION BEAM DEVICE
WATANABE, Keiji, MINE, Toshiyuki, MORISHITA, Masatoshi, SHICHI, Hiroyasu
Year of Publication 12.09.2018
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Year of Publication 12.09.2018
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ION BEAM APPARATUS AND ION BEAM IRRADIATION METHOD
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Year of Publication 10.08.2017
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Year of Publication 10.08.2017
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Ion source and ion beam device using same
Ose Yoichi, Shichi Hiroyasu, Arai Noriaki, Matsubara Shinichi, Kawanami Yoshimi
Year of Publication 02.05.2017
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Year of Publication 02.05.2017
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ION BEAM DEVICE
SAHO Norihide, SHICHI Hiroyasu, MATSUBARA Shinichi, ARAI Noriaki, YAMAOKA Masahiro
Year of Publication 16.03.2017
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Year of Publication 16.03.2017
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