Search Results - "SHIBUYA Kazutaka" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface

Evaluation of In-Plane Microdeformation Distribution Characteristics of Polishing Pad Surface

by Uneda, Michio, Omote, Tatsunori, Shibuya, Kazutaka, Nakamura, Yoshio, Ichikawa, Daizo, Ishikawa, Ken-ichi
Published in Japanese Journal of Applied Physics (01.05.2013)

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Journal Article

Influence analysis of removal rate in Si-chemical mechanical planarization/ polishing

Influence analysis of removal rate in Si-chemical mechanical planarization/ polishing

by UNEDA, Michio, TAKAHASHI, Yoshihiro, SHIBUYA, Kazutaka, NAKAMURA, Yoshio, ICHIKAWA, Daizo, ISHIKAWA, Ken-ichi
Published in Journal of the Japan Society for Abrasive Technology (01.10.2014)

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Journal Article

両面同時研磨における上定盤研磨パッド表面性状測定装置の開発と研磨特性の評価

両面同時研磨における上定盤研磨パッド表面性状測定装置の開発と研磨特性の評価

by 畝田, 道雄, 早川, 光祐, 澁谷, 和孝, 中村, 由夫, 市川, 大造, 石川, 憲一
Published in 砥粒加工学会誌 (01.07.2017)

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Journal Article

Development of system for evaluation of polishing pad surface asperity: Effects of pad surface asperity on removal rate

Development of system for evaluation of polishing pad surface asperity: Effects of pad surface asperity on removal rate

by UNEDA, Michio, MAEDA, Yuki, SHIBUYA, Kazutaka, NAKAMURA, Yoshio, ICHIKAWA, Daizo, ISHIKAWA, Ken-ichi
Published in Journal of the Japan Society for Abrasive Technology (01.06.2013)

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Journal Article

サファイアCMPにおける研磨パッド表面温度と研磨レートの関係

サファイアCMPにおける研磨パッド表面温度と研磨レートの関係

by 畝田, 道雄, 松永, 敬弘, 高橋, 佳宏, 澁谷, 和孝, 中村, 由夫, 市川, 大造, 石川, 憲一
Published in 砥粒加工学会誌 (2016)

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Journal Article

렌즈 장치

렌즈 장치

by SHIBUYA KAZUTAKA, NIIKURA TSUNEMI, HIRANO KATSUYA
Year of Publication 24.06.2022

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE

OPTICAL RECEPTACLE AND OPTICAL MODULE

by SHIBUYA KAZUTAKA
Year of Publication 08.10.2015

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE HAVING THE SAME

OPTICAL RECEPTACLE AND OPTICAL MODULE HAVING THE SAME

by SHIBUYA KAZUTAKA
Year of Publication 08.10.2015

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE

OPTICAL RECEPTACLE AND OPTICAL MODULE

by SHIBUYA, KAZUTAKA
Year of Publication 24.09.2015

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE

OPTICAL RECEPTACLE AND OPTICAL MODULE

by SHIBUYA, KAZUTAKA
Year of Publication 24.09.2015

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Patent

비접촉식 웨이퍼 두께 측정 장치

비접촉식 웨이퍼 두께 측정 장치

by MIYAGAWA CHIHIRO, SHIBUYA KAZUTAKA, AOKI KIYOHITO
Year of Publication 21.01.2022

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED THEREWITH

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED THEREWITH

by SHIBUYA KAZUTAKA
Year of Publication 11.12.2014

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED THEREWITH

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED THEREWITH

by SHIBUYA KAZUTAKA
Year of Publication 11.12.2014

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Patent

LENS DEVICE

LENS DEVICE

by SHIBUYA, Kazutaka, NIIKURA, Tsunemi, HIRANO, Katsuya
Year of Publication 10.06.2021

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Patent

NOZZLE AND WORK POLISHING APPARATUS

NOZZLE AND WORK POLISHING APPARATUS

by SHIBUYA KAZUTAKA, NAKAMURA YOSHIO
Year of Publication 27.10.2017

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Patent

NOZZLE AND WORKPIECE POLISHING DEVICE

NOZZLE AND WORKPIECE POLISHING DEVICE

by SHIBUYA KAZUTAKA, NAKAMURA YOSHIO
Year of Publication 26.10.2017

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Patent

Si-CMPの研磨レートに及ぼす要因分析

Si-CMPの研磨レートに及ぼす要因分析

by 畝田, 道雄, 髙橋, 佳宏, 澁谷, 和孝, 中村, 由夫, 市川, 大造, 石川, 憲一
Published in 砥粒加工学会誌 (2014)

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Journal Article

NON-CONTACT-TYPE WAFER THICKNESS MEASUREMENT DEVICE

NON-CONTACT-TYPE WAFER THICKNESS MEASUREMENT DEVICE

by SHIBUYA Kazutaka, MIYAGAWA Chihiro, AOKI Kiyohito
Year of Publication 19.11.2020

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Patent

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED WITH SAME

OPTICAL RECEPTACLE AND OPTICAL MODULE PROVIDED WITH SAME

by SHIBUYA KAZUTAKA
Year of Publication 19.09.2013

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Patent

LENS ARRAY AND OPTICAL MODULE PROVIDED WITH THE SAME

LENS ARRAY AND OPTICAL MODULE PROVIDED WITH THE SAME

by MORIOKA SHINPEI, SHIBUYA KAZUTAKA
Year of Publication 09.03.2017

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Patent

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