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Development of Selenonium PAGs in EUV Lithography toward High Sensitivity Achievement
by
Kizu, Tomohito
,
Yamakawa, Shinji
,
Watanabe, Takeo
,
Yasui, Seiji
,
Shibagaki
,
Tomoyuki
Published in
Journal of Photopolymer Science and Technology
(16.12.2022)
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광산 발생제 및 포토리소그래피용 수지 조성물
by
SHIBAGAKI TOMOYUKI
Year of Publication
26.07.2021
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ORGANOMETALLIC COMPOUND, PHOTOSENSITIVE MATERIAL FOR PHOTORESIST, AND PHOTORESIST
by
KIZU TOMOHITO
,
SHIBAGAKI TOMOYUKI
Year of Publication
21.05.2024
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ORGANOMETALLIC COMPOUND, PHOTOSENSITIVE MATERIAL FOR PHOTORESIST, AND PHOTORESIST
by
KIZU TOMOHITO
,
SHIBAGAKI TOMOYUKI
Year of Publication
21.05.2024
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SULFONIUM SALT, ACID GENERATOR CONTAINING THE SULFONIUM SALT, AND PHOTORESIST CONTAINING THE SULFONIUM SALT
by
KIZU TOMOHITO
,
SHIBAGAKI TOMOYUKI
Year of Publication
21.05.2024
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NONIONIC OXIME COMPOUND, ORGANOMETALLIC COMPOUND, ACID GENERATOR, RESIST PHOTOSENSITIVE MATERIAL, AND RESIST
by
KIZU TOMOHITO
,
SHIBAGAKI TOMOYUKI
Year of Publication
21.05.2024
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ORGANOMETALLIC COMPOUND, SULFONIUM SALT-TYPE COMPOUND, NONION OXIME-TYPE COMPOUND, PHOTOSENSITIVE MATERIAL, ACID GENERATOR, AND PHOTORESIST
by
SHIBAGAKI
,
Tomoyuki
,
KIZU, Tomohito
Year of Publication
16.05.2024
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PHOTO-ACID GENERATOR AND RESIN COMPOSITION FOR PHOTOLITHOGRAPHY
by
SHIBAGAKI TOMOYUKI
Year of Publication
04.06.2020
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PHOTO-ACID GENERATOR AND RESIN COMPOSITION FOR PHOTOLITHOGRAPHY
by
SHIBAGAKI Tomoyuki
Year of Publication
28.05.2020
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PRODUCTION METHOD OF SULFONIUM SALT
by
YASUI SEIJI
,
SHIBAGAKI TOMOYUKI
Year of Publication
30.08.2022
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EPOXY RESIN CURING ACCELERATOR, AND EPOXY RESIN COMPOSITION FOR SEALING SEMICONDUCTOR
by
SHIBAGAKI TOMOYUKI
Year of Publication
25.05.2017
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CATALYST COMPOSITION FOR PRODUCING POLYURETHANE RESIN COMPOSITION
by
SHIBAGAKI TOMOYUKI
Year of Publication
13.04.2017
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EPOXY RESIN CURING ACCELERATOR AND EPOXY RESIN COMPOSITION FOR SEALING SEMICONDUCTOR
by
SHIBAGAKI TOMOYUKI
Year of Publication
08.12.2016
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EPOXY RESIN CURING ACCELERATOR AND EPOXY RESIN COMPOSITION FOR SEALING SEMICONDUCTOR
by
SHIBAGAKI TOMOYUKI
Year of Publication
14.07.2016
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광산 발생제 및 포토리소그래피용 수지 조성물
by
NAKAMURA YUJI
,
SHIBAGAKI TOMOYUKI
Year of Publication
06.08.2019
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PHOTOACID GENERATOR AND RESIN COMPOSITION FOR PHOTOLITHOGRAPHY
by
WATANABE TAKEO
,
YASUI SEIJI
,
SHIBAGAKI TOMOYUKI
Year of Publication
16.08.2022
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PHOTOACID GENERATOR AND RESIN COMPOSITION FOR PHOTOLITHOGRAPHY
by
WATANABE Takeo
,
YASUI Seiji
,
SHIBAGAKI Tomoyuki
Year of Publication
11.08.2022
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CATALYST FOR HARD URETHANE FOAM PRODUCTION
by
SHIBAGAKI TOMOYUKI
Year of Publication
24.08.2015
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CATALYST FOR HARD URETHANE FOAM PRODUCTION
by
SHIBAGAKI TOMOYUKI
Year of Publication
24.08.2015
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광산 발생제 및 포토리소그래피용 수지 조성물
by
NAKAMURA YUJI
,
SHIBAGAKI TOMOYUKI
Year of Publication
19.12.2018
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