A 70-dB SNR High-Speed Global Shutter CMOS Image Sensor for in Situ Fluid Concentration Distribution Measurements
Oikawa, Tetsu, Kuroda, Rihito, Takahashi, Keigo, Shiba, Yoshinobu, Fujihara, Yasuyuki, Shike, Hiroya, Murata, Maasa, Kuo, Chia-Chi, Silva, Yhang Ricardo Sipauba Carvalho da, Goto, Tetsuya, Suwa, Tomoyuki, Morimoto, Tatsuo, Shirai, Yasuyuki, Inada, Takafumi, Sakai, Yushi, Nagase, Masaaki, Ikeda, Nobukazu, Sugawa, Shigetoshi
Published in IEEE transactions on electron devices (01.06.2022)
Published in IEEE transactions on electron devices (01.06.2022)
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Journal Article
[Invited Paper] A High SNR Global Shutter CMOS Image Sensor Technology for High Precision Absorption Imaging Applications
Oikawa, Tetsu, Kuroda, Rihito, Hamaya, Aoi, Shiba, Yoshinobu, Inada, Takafumi, Sakai, Yushi, Shirai, Yasuyuki, Sugawa, Shigetoshi
Published in ITE TRANSACTIONS ON MEDIA TECHNOLOGY AND APPLICATIONS (2024)
Published in ITE TRANSACTIONS ON MEDIA TECHNOLOGY AND APPLICATIONS (2024)
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Journal Article
A High Sensitivity and Compact Real Time Gas Concentration Sensor for Semiconductor and Electronic Device Manufacturing Process
Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in ECS transactions (19.06.2018)
Published in ECS transactions (19.06.2018)
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Journal Article
Highly Effective and Reversible Control of the Rocking Rates of Rotaxanes by Changes to the Size of Stimulus-Responsive Ring Components
Hirose, Keiji, Ishibashi, Kazuaki, Shiba, Yoshinobu, Doi, Yasuko, Tobe, Yoshito
Published in Chemistry : a European journal (27.06.2008)
Published in Chemistry : a European journal (27.06.2008)
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Journal Article
Dependence of the Decomposition of Trimethylaluminum on Oxygen Concentration
Yamashita, Satoru, Watanuki, Kohei, Ishii, Hidekazu, Shiba, Yoshinobu, Kitano, Masafumi, Shirai, Yasuyuki, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in Journal of the Electrochemical Society (2011)
Published in Journal of the Electrochemical Society (2011)
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Journal Article
A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit
Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in 2016 IEEE SENSORS (01.10.2016)
Published in 2016 IEEE SENSORS (01.10.2016)
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Conference Proceeding
Oxidizing Species Dependence of the Interface Reaction during Atomic-Layer-Deposition Process and Post-Deposition-Anneal
Suwa, Tomoyuki, Teramoto, Akinobu, Koda, Yasumasa, Saito, Masaya, Sugita, Hisaya, Hayashi, Marie, Tsuchimoto, Junichi, Ishii, Hidekazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Sugawa, Shigetoshi
Published in ECS transactions (19.08.2016)
Published in ECS transactions (19.08.2016)
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Journal Article
Control of rocking mobility of rotaxanes by size change of stimulus-responsive ring components
Hirose, Keiji, Ishibashi, Kazuaki, Shiba, Yoshinobu, Doi, Yasuko, Tobe, Yoshito
Published in Chemistry letters (05.06.2007)
Published in Chemistry letters (05.06.2007)
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Journal Article
A Shuttling Molecular Machine with Reversible Brake Function
Hirose, Keiji, Shiba, Yoshinobu, Ishibashi, Kazuaki, Doi, Yasuko, Tobe, Yoshito
Published in Chemistry : a European journal (07.04.2008)
Published in Chemistry : a European journal (07.04.2008)
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Journal Article
Visualization and Analysis of Temporal and Steady-State Gas Concentration in Process Chamber Using 70-dB SNR 1000 fps Absorption Imaging System
Sakai, Yushi, Shiba, Yoshinobu, Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Oikawa, Tetsu, Hamaya, Aoi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Sugawa, Shigetoshi, Kuroda, Rihito
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)
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Journal Article
Measuring Temporal Variation of Concentration of ALD Precursor TEMAZ in Process Chamber Using UV Absorption Method
Inada, Takafumi, Goto, Tetsuya, Suwa, Tomoyuki, Nagase, Masaaki, Ishii, Hidekazu, Shiba, Yoshinobu, Sakai, Yushi, Sutoh, Akihito, Morimoto, Tatsuo, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in ECS transactions (19.05.2023)
Published in ECS transactions (19.05.2023)
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Journal Article
A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system
Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in Japanese Journal of Applied Physics (01.04.2019)
Published in Japanese Journal of Applied Physics (01.04.2019)
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Journal Article
Chemical synthesis of a very long oligoribonucleotide with 2-cyanoethoxymethyl (CEM) as the 2'-O-protecting group: structural identification and biological activity of a synthetic 110mer precursor-microRNA candidate
Shiba, Yoshinobu, Masuda, Hirofumi, Watanabe, Naoki, Ego, Takeshi, Takagaki, Kazuchika, Ishiyama, Kouichi, Ohgi, Tadaaki, Yano, Junichi
Published in Nucleic acids research (01.05.2007)
Published in Nucleic acids research (01.05.2007)
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Journal Article
SiN x Deposition at Low Temperature Using UV-Irradiated NH 3
Shiba, Yoshinobu, Teramoto, Akinobu, Suwa, Tomoyuki, Ishii, Katsutoshi, Shimizu, Akira, Umezawa, Kota, Kuroda, Rihito, Sugawa, Shigetoshi
Published in ECS transactions (08.04.2019)
Published in ECS transactions (08.04.2019)
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Journal Article