Design and experimental analysis for innovative wide bandwidth vibration sensor
Chung-Yang Sue, Chih-Che Lin, Chun-Yin Tsai, Chih-Yuan Chen, Li-Tao Teng, Wei-Liang Chen, Chih-Hsiou Lin, Jieh-Ling Shiau
Published in 2016 11th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) (01.10.2016)
Published in 2016 11th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) (01.10.2016)
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Conference Proceeding
SOG micromechanical resonator utilizing single crystal Si and CMOS ASIC
Sheng-Ren Chiu, Jen-Yi Chen, Shih-Chieh Lin, Li-Tao Teng, Shih-Ting Lin, Jieh-Ling Shiau, Yu-Wen Hsu, Yan-Kuin Su
Published in 2010 5th International Microsystems Packaging Assembly and Circuits Technology Conference (01.10.2010)
Published in 2010 5th International Microsystems Packaging Assembly and Circuits Technology Conference (01.10.2010)
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Conference Proceeding