Autotune Identification under Load Disturbance
Shen, Shih-Haur, Wu, Jiun-Sheng, Yu, Cheng-Ching
Published in Industrial & engineering chemistry research (1996)
Published in Industrial & engineering chemistry research (1996)
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Use of saturation-relay feedback for autotune identification
Shen, Shih-Haur, Hong-Den Yu, Yu, Cheng-Ching
Published in Chemical engineering science (01.04.1996)
Published in Chemical engineering science (01.04.1996)
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Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
Xu, Kun, Shen, Shih-Haur, Fung, Jason, Iravani, Hassan, Carlsson, Ingemar, Liu, Tzu-Yu, Swedek, Bogdan, Chang, Shou-Sung, Tu, Wen-chiang, Kitajima, Tomohiko, Mikhaylich, Katrina, Brown, Brian, Huey, Sidney, Redeker, Fritz
Published in ECS journal of solid state science and technology (01.01.2016)
Published in ECS journal of solid state science and technology (01.01.2016)
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CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM
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Year of Publication 27.06.2023
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Year of Publication 27.06.2023
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Derivation of transfer function from relay feedback systems
Chang, Ren Chiou, Shen, Shih Haur, Yu, Cheng Ching
Published in Industrial & engineering chemistry research (01.03.1992)
Published in Industrial & engineering chemistry research (01.03.1992)
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Journal Article
CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, IVANOV DENIS, XU KUN, SHEN SHIH HAUR
Year of Publication 29.09.2022
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Year of Publication 29.09.2022
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TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
SEKINE KENTO, SHEN SHIH-HAUR, HARI SOUNDARARAJAN, TANG JIANSHE, CHANG SHOU-SUNG, WU HAOSHENG, YANG YENU
Year of Publication 27.06.2023
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Year of Publication 27.06.2023
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POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, IVANOV DENIS, LEE HARRY Q, XU KUN, SHEN SHIH HAUR
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
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RESISTIVITY-BASED ADJUSTMENT OF MEASUREMENTS FROM IN-SITU MONITORING
SWEDEK BOGUSLAW A, LIU TZU YU, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 30.01.2023
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Year of Publication 30.01.2023
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음향 캐리어 헤드 모니터링
OH JEONGHOON, ZUNIGA STEVEN M, BROWN BRIAN J, DESAI RUSHABHKUMAR, SHEN SHIH-HAUR, NAGENGAST ANDREW J, TANG JIANSHE, WITTY DEREK R, HU YUFEI, WU HAOSHENG
Year of Publication 23.07.2024
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Year of Publication 23.07.2024
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CMP에서의 온도 및 슬러리 유량 제어
SOUNDARARAJAN HARI, BROWN BRIAN J, TANG JIANSHE, WU HAOSHENG, SHEN SHIH HAUR, CHANG SHOU SUNG
Year of Publication 17.08.2022
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Year of Publication 17.08.2022
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Metal Clearing Process Control in Metal CMP
Xu, Kun, Carlsson, Ingemar, Liu, Tzu-Yu, Shen, Shih-Haur, Swedek, Bogdan, Wang, You, Xia, Xinyun, Bennett, Doyle, Tu, Wen-Chiang, Karuppiah, Lakshmanan
Published in ECS transactions (01.04.2013)
Published in ECS transactions (01.04.2013)
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Journal Article
화학적 기계적 연마의 온도 제어
SOUNDARARAJAN HARI, SEKINE TAKETO, YANG YEN CHU, TANG JIANSHE, WU HAOSHENG, SHEN SHIH HAUR, CHANG SHOU SUNG
Year of Publication 24.06.2020
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Year of Publication 24.06.2020
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인-시튜 전자기 유도 모니터링 시스템을 위한 코어 구성
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, IVANOV DENIS, XU KUN, SHEN SHIH HAUR
Year of Publication 30.05.2019
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Year of Publication 30.05.2019
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모니터링을 위해 신경망을 사용하는 연마 장치
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, IVANOV DENIS, LEE HARRY Q, XU KUN, SHEN SHIH HAUR
Year of Publication 02.12.2019
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Year of Publication 02.12.2019
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인-시튜 모니터링으로부터의 측정들의 비저항 기반 조정
SWEDEK BOGUSLAW A, LIU TZU YU, XU KUN, CARLSSON INGEMAR, SHEN SHIH HAUR
Year of Publication 22.08.2019
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Year of Publication 22.08.2019
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