Addressable failure site test structures (AFS-TS) for CMOS processes: Design guidelines, fault simulation, and implementation
Doong, K.Y.-Y., Sunnys Hsieh, Sheng-Che Lin, Binson Shen, Jye-Yen Cheng, Ding-Ming Kwai, Hess, C., Weiland, L.H., Hsu, C.C.H.
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Get full text
Journal Article
The short-loop process tuning & yield evaluation by using the addressable failure site test structures (AFS-TS)
Yih-Yuh Doong, K., Sunnys Hsieh, Sheng-Che Lin, Binson Shen, Hsu, C.C.-H.
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
Get full text
Conference Proceeding
Addressable failure site test structures (AFS-TS) for CMOS processes: Design guidelines, fault simulation, and implementation
DOONG, Kelvin Yih-Yuh, HSIEH, Sunnys, LIN, Sheng-Che, SHEN, Binson, CHENG, Jye-Yen, KWAI, Ding-Ming, HESS, Christopher, WEILAND, Larg H, HSU, Charles Ching-Hsiang
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Published in IEEE transactions on semiconductor manufacturing (01.11.2001)
Get full text
Conference Proceeding
Journal Article
An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run
Doong, K.Y.-Y., Hsieh, S., Lin, S.C., Hung, L.J., Wang, R.J., Binson Shen, Hisa, J.W., Guo, J.C., Chen, I.C., Young, K.L., Hsu, C.C.-H.
Published in Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002 (2002)
Published in Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002 (2002)
Get full text
Conference Proceeding
The role of test structures for yield enhancement and yield ramp-up: an example of adoptive yield enhancement (AYE): n/sup +//p-well junction leakage enhanced the abnormal leakage current of NMOS's parasitic NPN-BJT
Doong, K.Y.Y., Binson Shen, Sunnys Hsieh, Sheng-che Lin, Hsu, C.C.-H.
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
Published in Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) (2000)
Get full text
Conference Proceeding
Scaling variance, invariance and prediction of design rule: from 0.25-/spl mu/m to 0.10-/spl mu/m nodes in the era of foundry manufacturing
Doong, K.Y.-Y., Ting, J.K., Sunnys Hsieh, Lin, S.C., Binson Shen, Guo, J.C., Young, K.L., Chen, I.C., Sun, J.Y.C., Wang, J.K.
Published in 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550) (2001)
Published in 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550) (2001)
Get full text
Conference Proceeding
Addressable failure site test structures (AFS-TS) for process development and optimization
Doong, K.Y.-Y., Sunnys Hsieh, Sheng-Che Lin, Binson Shen, Wang Chien-Jung, Yen-Hen Ho, Jye-Yen Cheng, Yeu-Haw Yang, Miyamoto, K., Hsu, C.C.-H.
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Get full text
Conference Proceeding
Optimization of low-k dielectric (fluorinated SiO/sub 2/) process and evaluation of yield impact by using BEOL test structures
Sunnys Hsieh, Doong, K.Y.-Y., Yen-Hsuan Ho, Sheng-Che Lin, Binson Shen, Sing-Mo Tseng, Yeu-Haw Yang, Hsu, C.C.-H.
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Get full text
Conference Proceeding