Near-field spectral effects due to electromagnetic surface excitations
Shchegrov, AV, Joulain, K, Carminati, R, Greffet, JJ
Published in Physical review letters (14.08.2000)
Published in Physical review letters (14.08.2000)
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Journal Article
Three-mirror resonator with aspheric feedback mirror for laser spatial mode selection and mode shaping
Yang, Z.H., Leger, J.R., Shchegrov, A.V.
Published in IEEE journal of quantum electronics (01.09.2004)
Published in IEEE journal of quantum electronics (01.09.2004)
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Journal Article
OPTICAL METROLOGY WITH SMALL ILLUMINATION SPOT SIZE
SHCHEGROV ANDREI V, SAPIENS NOAM, PETERLINZ KEVIN A, BUETTNER ALEXANDER, PURRUCKER KERSTIN
Year of Publication 23.07.2024
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Year of Publication 23.07.2024
Patent
연질 x-선 산란계측에 기초한 오버레이 측정을 위한 방법 및 시스템
SHCHEGROV ANDREI V, KUZNETSOV ALEXANDER, GELLINEAU ANTONIO, GUTMAN NADAV
Year of Publication 02.09.2022
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Year of Publication 02.09.2022
Patent
계측을 위한 퓨필 평면 빔 스캐닝
SHCHEGROV ANDREI V, HILL ANDREW V, MANASSEN AMNON, GRANOT ASAF, ABRAMOV AVI
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
Patent
다수의 측정 컬럼들을 사용한 대규모 오버레이 계측 샘플링
SHCHEGROV ANDREI V, HILL ANDREW V, UZIEL YORAM, SIMON YOSSI, MANASSEN AMNON, MADSEN JONATHAN, LAREDO GILAD
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
Patent
자가 교정 오버레이 계측
SHCHEGROV ANDREI V, YERUSHALMI LIRAN, KUZNETSOV ALEXANDER, SANKO DIMITRY, DUBEY MAHENDRA, PANDEV STILIAN IVANOV, MOON MIN YEONG, MADSEN JONATHAN
Year of Publication 09.01.2024
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Year of Publication 09.01.2024
Patent
MEASUREMENT OF MULTIPLE PATTERNING PARAMETERS
SHCHEGROV ANDREI V, DZIURA THADDEUS GERARD, KRISHNAN SHANKAR, SAPIENS NOAM, PANDEV STILIAN IVANOV, PTERLINZ KEVIN
Year of Publication 07.07.2022
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Year of Publication 07.07.2022
Patent
MEASUREMENT OF OVERLAY ERROR USING DEVICE INSPECTION SYSTEM
PARK ALLEN, YERUSHALMI LIRAN, SHCHEGROV ANDREI, MANASSEN AMNON, PANDEV STILIAN, JI FANGREN, HOO GEORGE (CHOON), MADSEN JON, ANI ANTONIO
Year of Publication 20.10.2023
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Year of Publication 20.10.2023
Patent
COMBINED X-RAY AND OPTICAL METROLOGY
BAKEMAN MICHAEL, SHCHEGROV ANDREI, DZIURA THADDEUS GERARD, PETERLINZ KEVIN
Year of Publication 15.11.2019
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Year of Publication 15.11.2019
Patent