Search Results - "SHCHEGROV ANDREI" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Bandgap measurements of patterned film stacks using spectroscopic metrology

Bandgap measurements of patterned film stacks using spectroscopic metrology

by Chouaib, Houssam, Kuznetsov, Alexander, Hu, Dawei, Shchegrov, Andrei V, Zhao, Qiang, Pandev, Stilian, Kaack, Torsten R, Lee, Liequan, Rosenberg, Aaron, Nguyen, Manh Dang, Lesoine, John, Tan, Zhengquan, Di, Ming, Wang, Tianhan
Year of Publication 24.10.2023

Get full text

Patent

DIFFERENTIAL METHODS AND APPARATUS FOR METROLOGY OF SEMICONDUCTOR TARGETS

DIFFERENTIAL METHODS AND APPARATUS FOR METROLOGY OF SEMICONDUCTOR TARGETS

by PANDEV, Stilian Ivanov, SHCHEGROV, Andrei V
Year of Publication 24.05.2017

Get full text

Patent

Vorrichtung und Verfahren zur optischen Metrologie mit optimierten Systemparametern

Vorrichtung und Verfahren zur optischen Metrologie mit optimierten Systemparametern

by SHCHEGROV, ANDREI
Year of Publication 23.07.2015

Get full text

Patent

Overlay Metrology Using Multiple Parameter Configurations

Overlay Metrology Using Multiple Parameter Configurations

by Manassen, Amnon, Sapiens, Noam, Shchegrov, Andrei V, Hill, Andrew V
Year of Publication 07.02.2019

Get full text

Patent

OVERLAY METROLOGY USING MULTIPLE PARAMETER CONFIGURATIONS

OVERLAY METROLOGY USING MULTIPLE PARAMETER CONFIGURATIONS

by SAPIENS, Noam, HILL, Andrew V, SHCHEGROV, Andrei, MANASSEN, Amnon
Year of Publication 07.02.2019

Get full text

Patent

OVERLAY METROLOGY USING MULTIPLE PARAMETER CONFIGURATIONS

OVERLAY METROLOGY USING MULTIPLE PARAMETER CONFIGURATIONS

by HILL, Andrew, SAPIENS, Noam, SHCHEGROV, Andrei, MANASSEN, Amnon
Year of Publication 07.02.2019

Get full text

Patent

METHODS AND SYSTEMS FOR CO-LOCATED METROLOGY

METHODS AND SYSTEMS FOR CO-LOCATED METROLOGY

by MADSEN, Jonathan M, SHCHEGROV, Andrei V, WANG, David Y, FRIEDMANN, Michael, KUZNETSOV, Alexander, SALCIN, Esen, SHAUGHNESSY, Derrick
Year of Publication 13.10.2021

Get full text

Patent

Semiconductor metrology based on hyperspectral imaging

Semiconductor metrology based on hyperspectral imaging

by Buettner, Alexander, Wang, David Y, Saerchen, Emanuel, Blasenheim, Barry, Shchegrov, Andrei V, Pandev, Stilian Ivanov
Year of Publication 13.10.2020

Get full text

Patent

System, method and computer program product for combining raw data from multiple metrology tools

System, method and computer program product for combining raw data from multiple metrology tools

by Dziura, Thaddeus Gerard, Shchegrov, Andrei V, Pandev, Stilian Ivanov
Year of Publication 11.12.2018

Get full text

Patent

MEASUREMENT OF MULTIPLE PATTERNING PARAMETERS

MEASUREMENT OF MULTIPLE PATTERNING PARAMETERS

by SAPIEN, Noam, PANDEV, Stilian Ivanov, KRISHNAN, Shankar, DZIURA, Thaddeus Gerard, SHCHEGROV, Andrei V, PTERLINZ, Kevin
Year of Publication 16.09.2020

Get full text

Patent

Apparatus, techniques, and target designs for measuring semiconductor parameters

Apparatus, techniques, and target designs for measuring semiconductor parameters

by Sapiens, Noam, Shchegrov, Andrei V, Pandev, Stilian Ivanov
Year of Publication 23.10.2018

Get full text

Patent

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

by Veldman, Andrei, Shaughnessy, Derrick A, Rotter, Lawrence D, Wang, David Y, Shchegrov, Andrei V, Brady, Gregory, Peterlinz, Kevin
Year of Publication 22.07.2021

Get full text

Patent

Transmission Small-Angle X-Ray Scattering Metrology System

Transmission Small-Angle X-Ray Scattering Metrology System

by Gellineau, Antonio Arion, Shchegrov, Andrei V, Zalubovsky, Sergey
Year of Publication 18.10.2018

Get full text

Patent

COMPUTATIONALLY EFFICIENT X-RAY BASED OVERLAY MEASUREMENT

COMPUTATIONALLY EFFICIENT X-RAY BASED OVERLAY MEASUREMENT

by BAKEMAN, Michael, HENCH, John, SHCHEGROV, Andrei
Year of Publication 03.11.2016

Get full text

Patent

SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING

SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING

by BLASENHEIM, Barry, SHCHEGROV, Andrei V, WANG, David Y, BUETTNER, Alexander, SAERCHEN, Emanuel, PANDEV, Stilian
Year of Publication 16.07.2020

Get full text

Patent

SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING

SEMICONDUCTOR METROLOGY BASED ON HYPERSPECTRAL IMAGING

by BLASENHEIM, Barry, SHCHEGROV, Andrei V, WANG, David Y, BUETTNER, Alexander, SAERCHEN, Emanuel, PANDEV, Stilian
Year of Publication 16.07.2020

Get full text

Patent

Semiconductor Metrology Based On Hyperspectral Imaging

Semiconductor Metrology Based On Hyperspectral Imaging

by Buettner, Alexander, Wang, David Y, Saerchen, Emanuel, Blasenheim, Barry, Shchegrov, Andrei V, Pandev, Stilian Ivanov
Year of Publication 16.07.2020

Get full text

Patent

PROCESS ROBUST OVERLAY METROLOGY BASED ON OPTICAL SCATTEROMETRY

PROCESS ROBUST OVERLAY METROLOGY BASED ON OPTICAL SCATTEROMETRY

by LU, Wei, PANDEV, Stilian, SHCHEGROV, Andrei
Year of Publication 07.09.2018

Get full text

Patent

Process Robust Overlay Metrology Based On Optical Scatterometry

Process Robust Overlay Metrology Based On Optical Scatterometry

by Lu, Wei, Shchegrov, Andrei V, Pandev, Stilian Ivanov
Year of Publication 06.09.2018

Get full text

Patent

Measurement of Overlay Error Using Device Inspection System

Measurement of Overlay Error Using Device Inspection System

by Hoo, Choon Hoong, Mani, Antonio, Shchegrov, Andrei, Manassen, Amnon, Yerushalmi, Liran, Park, Allen, Pandev, Stilian, Ji, Fangren, Madsen, Jon
Year of Publication 27.05.2021

Get full text

Patent

[1]
Prev
3
4
5
6
7
8
9
10
11
12
13
Next
[20]