Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
Nguyen, Son T, Sangam, Kedarnath, Schwartz, Miriam, Choi, Kenric, Bhat, Sanjay, Narwankar, Pravin K, Kher, Shreyas, Sharangapani, Rahul, Muthukrishnan, Shankar, Deaton, Paul
Year of Publication 14.09.2010
Get full text
Year of Publication 14.09.2010
Patent
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
NARWANKAR PRAVIN K, SHARANGAPANI RAHUL, SCHWARTZ MIRIAM, CHOI KENRIC, BHAT SANJAY, NGUYEN SON T, MUTHUKRISHNAN SHANKAR, SANGAM KEDARNATH, KHER SHREYAS, DEATON PAUL
Year of Publication 14.09.2010
Get full text
Year of Publication 14.09.2010
Patent
CONTROL OF GAS FLOW AND DELIVERY TO SUPPRESS THE FORMATION OF PARTICLES IN AN MOCVD/ALD SYSTEM
NARWANKAR PRAVIN K, SHARANGAPANI RAHUL, SCHWARTZ MIRIAM, CHOI KENRIC, BHAT SANJAY, NGUYEN SON T, SANGAM KEDARNATH, MUTHUKRISHNAM SHANKAR, KHER SHREYAS, DEATON PAUL
Year of Publication 21.02.2008
Get full text
Year of Publication 21.02.2008
Patent
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
NARWANKAR PRAVIN K, SHARANGAPANI RAHUL, SCHWARTZ MIRIAM, CHOI KENRIC, BHAT SANJAY, NGUYEN SON T, MUTHUKRISHNAN SHANKAR, SANGAM KEDARNATH, KHER SHREYAS, DEATON PAUL
Year of Publication 17.11.2005
Get full text
Year of Publication 17.11.2005
Patent