3D NAND STAIRCASE ENCAPSULATION IN 3D NAND FABRICATION
YU YONGSIK, VARADARAJAN BHADRI N, SHANKAR NAGRAJ, VAN SCHRAVENDIJK BART J
Year of Publication 11.12.2023
Get full text
Year of Publication 11.12.2023
Patent
COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
PASQUALE FRANK L, SHANKAR NAGRAJ, RAINVILLE MELIHA GOZDE, SWAMINATHAN SHANKAR, REDDY KAPU SIRISH
Year of Publication 17.07.2023
Get full text
Year of Publication 17.07.2023
Patent
SELECTIVE FORMATION OF DIELECTRIC BARRIERS FOR METAL INTERCONNECTS IN SEMICONDUCTOR DEVICES
LEE WILLIAM T, VARADARAJAN BHADRI N, WU HUI JUNG, SHANKAR NAGRAJ, MOUNTSIER THOMAS WELLER
Year of Publication 15.06.2023
Get full text
Year of Publication 15.06.2023
Patent
DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS
RAINVILLE MELIHA GOZDE, SHANKAR NAGRAJ, HAUSMANN DENNIS M, REDDY KAPU SIRISH
Year of Publication 30.05.2023
Get full text
Year of Publication 30.05.2023
Patent
ETCH-STOP LAYER DEPOSITION FOR ENHANCED PATTERNING
MOHIMI ELHAM, SHANKAR NAGRAJ, ZHANG PENGYI, JARIWALA BHAVIN, HENRI JON, MAHOROWALA ARPAN PRAVIN, REDDY KAPU SIRISH
Year of Publication 10.03.2023
Get full text
Year of Publication 10.03.2023
Patent
METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCESS CHAMBER
BREILING PATRICK, SUBRAMONIUM PRAMOD, O'LOUGHLIN JENNIFER, SHANKAR NAGRAJ, GERBER KEVIN
Year of Publication 04.02.2021
Get full text
Year of Publication 04.02.2021
Patent
페이스리스 샤워헤드 (FACELESS SHOWERHEAD)
SHANKAR NAGRAJ, JONES CHRISTOPHER MATTHEW, WILLIAMS BRIAN JOSEPH, BAILEY CURTIS W, RAMNANI PANKAJ GHANSHYAM, DRAPER EMILE, BAPAT SHRIRAM VASANT
Year of Publication 12.06.2023
Get full text
Year of Publication 12.06.2023
Patent
3D NAND STAIRCASE ENCAPSULATION IN 3D NAND FABRICATION
YU YONGSIK, VARADARAJAN BHADRI N, SHANKAR NAGRAJ, VAN SCHRAVENDIJK BART J
Year of Publication 13.06.2022
Get full text
Year of Publication 13.06.2022
Patent
PMDSACRIFICIAL PRE-METAL DIELECTRIC FOR SELF-ALIGNED CONTACT SCHEME
SHANKAR NAGRAJ, MOUNTSIER THOMAS WELLER, BANERJI ANANDA K, VAN SCHRAVENDIJK BART J
Year of Publication 06.01.2022
Get full text
Year of Publication 06.01.2022
Patent
3D NAND 집적에 대해 개선된 에칭 선택도를 가지는 나이트라이드 막들
YOSHIZAWA KATSUNORI, SUBRAMONIUM PRAMOD, SHANKAR NAGRAJ, SAMANTARAY MALAY MILAN, VAN SCHRAVENDIJK BART J
Year of Publication 24.06.2021
Get full text
Year of Publication 24.06.2021
Patent
강화된 패터닝을 위한 에칭 정지 층 증착
MOHIMI ELHAM, SHANKAR NAGRAJ, ZHANG PENGYI, JARIWALA BHAVIN, HENRI JON, MAHOROWALA ARPAN PRAVIN, REDDY KAPU SIRISH
Year of Publication 21.12.2020
Get full text
Year of Publication 21.12.2020
Patent
3D NAND 제조시 계단형 봉지
YU YONGSIK, VARADARAJAN BHADRI N, SHANKAR NAGRAJ, VAN SCHRAVENDIJK BART J
Year of Publication 03.07.2019
Get full text
Year of Publication 03.07.2019
Patent