Symmetric plasma process chamber
Collins, Kenneth S, Buchberger, Jr., Douglas A, Chen, Zhigang, Nguyen, Andrew, Tavassoli, Hamid, Ramaswamy, Kartik, Carducci, James D, Balakrishna, Ajit, Rauf, Shahid
Year of Publication 28.01.2020
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Year of Publication 28.01.2020
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Symmetric plasma process chamber
Collins, Kenneth S, Buchberger, Jr., Douglas A, Chen, Zhigang, Nguyen, Andrew, Tavassoli, Hamid, Ramaswamy, Kartik, Carducci, James D, Balakrishna, Ajit, Rauf, Shahid
Year of Publication 14.01.2020
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Year of Publication 14.01.2020
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Substrate edge ring that extends process environment beyond substrate diameter
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Year of Publication 01.01.2023
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Year of Publication 01.01.2023
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Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates
Fovell Richard, Rauf Shahid, Carducci James D, Ramaswamy Kartik, Collins Kenneth S, Kenney Jason A
Year of Publication 16.01.2018
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Year of Publication 16.01.2018
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PLASMA CHAMBER WITH ELECTRODE ASSEMBLY
CARDUCCI, James D, BERA, Kallol, RAMASWAMY, Kartik, RICE, Michael R, GUO, Yue, COLLINS, Kenneth S, RAUF, Shahid
Year of Publication 27.12.2018
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Year of Publication 27.12.2018
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PROCESSING TOOL WITH ELECTRICALLY SWITCHED ELECTRODE ASSEMBLY
Collins, Kenneth S, Bera, Kallol, Rice, Michael R, Ramaswamy, Kartik, Carducci, James D, Guo, Yue, Rauf, Shahid
Year of Publication 27.12.2018
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Year of Publication 27.12.2018
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MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
LANE, Steven, RAMASWAMY, Kartik, LINDLEY, Roger Alan, YANG, Yang, COLLINS, Kenneth S, WONG, Lawrence, NGUYEN, Andrew, RAUF, Shahid
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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Multiple electrode substrate support assembly and phase control system
Yang, Yang, Lane, Steven, Collins, Kenneth S, Nguyen, Andrew, Ramaswamy, Kartik, Lindley, Roger Alan, Wong, Lawrence, Rauf, Shahid
Year of Publication 11.12.2018
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Year of Publication 11.12.2018
Patent
Symmetric plasma process chamber
Collins, Kenneth S, Buchberger, Jr., Douglas A, Chen, Zhigang, Nguyen, Andrew, Tavassoli, Hamid, Ramaswamy, Kartik, Carducci, James D, Balakrishna, Ajit, Rauf, Shahid
Year of Publication 22.10.2019
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Year of Publication 22.10.2019
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APPLYING POWER TO ELECTRODES OF PLASMA REACTOR
CARDUCCI, James D, BERA, Kallol, RAMASWAMY, Kartik, RICE, Michael R, GUO, Yue, COLLINS, Kenneth S, RAUF, Shahid
Year of Publication 01.11.2018
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Year of Publication 01.11.2018
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PLASMA REACTOR WITH FILAMENTS AND RF POWER APPLIED AT MULTIPLE FREQUENCIES
Collins, Kenneth S, Bera, Kallol, Rice, Michael R, Ramaswamy, Kartik, Carducci, James D, Guo, Yue, Rauf, Shahid
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
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PLASMA REACTOR WITH GROUPS OF ELECTRODES
Collins, Kenneth S, Bera, Kallol, Rice, Michael R, Ramaswamy, Kartik, Carducci, James D, Guo, Yue, Rauf, Shahid
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
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PLASMA REACTOR WITH PHASE SHIFT APPLIED ACROSS ELECTRODE ARRAY
Collins, Kenneth S, Bera, Kallol, Rice, Michael R, Ramaswamy, Kartik, Carducci, James D, Guo, Yue, Rauf, Shahid
Year of Publication 25.10.2018
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Year of Publication 25.10.2018
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