Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow
Fovell, Richard, Collins, Kenneth S, Kenney, Jason A, Buchberger, Jr., Douglas A, Nguyen, Andrew, Agarwal, Ankur, Dorf, Leonid, Ramaswamy, Kartik, Carducci, James D, Rauf, Shahid, Balakrishna, Ajit
Year of Publication 20.11.2018
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Year of Publication 20.11.2018
Patent
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching
Rauf Shahid, Carducci James D, Regelman Olga, Ramaswamy Kartik, Tavassoli Hamid, Collins Kenneth S, Dorf Leonid, Zhang Ying
Year of Publication 24.10.2017
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Year of Publication 24.10.2017
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ION-ION PLASMA ATOMIC LAYER ETCH PROCESS AND REACTOR
COLLINS, Kenneth, S, CARDUCCI, James, D, RAMASWAMY, Kartik, DORF, Leonid, YANG, Yang, RAUF, Shahid
Year of Publication 22.09.2016
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Year of Publication 22.09.2016
Patent
ION-ION PLASMA ATOMIC LAYER ETCH PROCESS AND REACTOR
Rauf Shahid, Carducci James D, Yang Yang, Ramaswamy Kartik, Collins Kenneth S, Dorf Leonid
Year of Publication 22.09.2016
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Year of Publication 22.09.2016
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Electron beam plasma source with segmented suppression electrode for uniform plasma generation
Lane Steven, Rauf Shahid, Carducci James D, Ramaswamy Kartik, Collins Kenneth S, Misra Nipun, Dorf Leonid
Year of Publication 13.09.2016
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Year of Publication 13.09.2016
Patent
Spatially discrete multi-loop RF-driven plasma source having plural independent zones
Lane Steven, Rauf Shahid, Yang Yang, Wong Lawrence, Ramaswamy Kartik, Collins Kenneth S
Year of Publication 09.08.2016
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Year of Publication 09.08.2016
Patent
Reducing aspect ratio dependent etch with direct current bias pulsing
SRINIVASAN, SUNIL, DASH, SHREERAM JYOTI, EPPLER, AARON, JOUBERT, OLIVIER P, RAUF, SHAHID, KENNEY, JASON A, NICHOLS, MICHAEL THOMAS, LIU, KUAN-TING, LIU, CHUNG, LI, DE-YANG, CHOU, YIUAN
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
Patent
Electron beam plasma source with reduced metal contamination
Lane Steven, Rauf Shahid, Carducci James D, Ramaswamy Kartik, Collins Kenneth S, Misra Nipun, Monroy Gonzalo Antonio, Dorf Leonid
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
Patent
Interface treatment of semiconductor surfaces with high density low energy plasma
DORF LEONID, NAINANI ANEESH, ZOPE BHUSHAN N, ABRAHAM MATHEW, DESHMUKH SUBHASH, BRAND ADAM, RAUF SHAHID
Year of Publication 28.06.2016
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Year of Publication 28.06.2016
Patent