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"SHAH, VINAY, K"
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"SHAH, VINAY, K"
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METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
by
SHAH VINAY K
,
HUDGENS JEFFREY C
Year of Publication
29.07.2010
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LASER MATERIAL REMOVAL METHODS AND APPARATUS
by
SHAH VINAY K
,
ZHANG ZHENHUA
,
RANA VIRENDRA V.S
,
EBERSPACHER CHRIS
Year of Publication
03.06.2011
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Methods and apparatus for transporting substrate carriers
by
SHAH VINAY K
,
HUDGENS JEFFREY C
Year of Publication
15.04.2015
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Methods, systems and apparatus for rapid exchange of work material
by
SHAH VINAY K
,
KOSHTI SUSHANT S
Year of Publication
11.11.2014
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Methods and apparatus for transporting substrate carriers
by
SHAH VINAY K
,
HUDGENS JEFFREY C
Year of Publication
18.03.2014
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AUTOMATED SUBSTRATE HANDLING AND FILM QUALITY INSPECTION IN SOLAR CELL PROCESSING
by
KUMARASWAMI, SURESH
,
SHAH
,
VINAY K
Year of Publication
03.02.2011
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AUTOMATED SUBSTRATE HANDLING AND FILM QUALITY INSPECTION IN SOLAR CELL PROCESSING
by
KUMARASWAMI, SURESH
,
SHAH
,
VINAY K
Year of Publication
04.11.2010
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Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
by
SHAH VINAY K
,
KOSHTI SUSHANT S
Year of Publication
22.01.2013
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System, methods and apparatus for substrate carrier content verification using a material handling system
by
SHAH VINAY K
,
KOSHTI SUSHANT S
,
ENGLHARDT ERIC A
Year of Publication
19.02.2013
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METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
by
SHAH VINAY K
,
HUDGENS JEFFREY C
,
ELLIOTT MARTIN
,
ENGLHARDT ERIC
Year of Publication
27.12.2012
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METHODS, SYSTEMS AND APPARATUS FOR RAPID EXCHANGE OF WORK MATERIAL
by
SHAH VINAY K
,
KOSHTI SUSHANT S
Year of Publication
15.07.2010
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Automated substrate handling and film quality inspection in solar cell processing
by
SHAH VINAY K
,
KUMARASWAMI SURESH
,
COX DAMON K
Year of Publication
27.11.2012
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Automated substrate handling and film quality inspection in solar cell processing
by
Shah
,
Vinay K
,
Kumaraswami, Suresh
,
Cox, Damon K
Year of Publication
27.11.2012
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LASER MATERIAL REMOVAL METHODS AND APPARATUS
by
SHAH VINAY K
,
ZHANG ZHENHUA
,
RANA VIRENDRA V.S
,
EBERSPACHER CHRIS
Year of Publication
22.11.2012
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METHODS AND APPARATUS FOR AN EFFICIENT HANDSHAKE BETWEEN MATERIAL HANDLING AND MATERIAL PROCESSING DEVICES FOR SAFE MATERIAL TRANSFER
by
SHAH VINAY K
,
KOSHTI SUSHANT S
Year of Publication
13.08.2009
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Methods and apparatus for purging a substrate carrier
by
SHAH VINAY K
,
HUDGENS JEFFREY C
,
ELLIOTT MARTIN
,
ENGLHARDT ERIC
Year of Publication
13.12.2011
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Methods and apparatus for purging a substrate carrier
by
Shah
,
Vinay K
,
Englhardt, Eric
,
Hudgens, Jeffrey C
,
Elliott, Martin
Year of Publication
13.12.2011
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Methods and loadport for purging a substrate carrier
by
SHAH VINAY K
,
HUDGENS JEFFREY C
,
ELLIOTT MARTIN R
,
ENGLHARDT ERIC
Year of Publication
08.04.2014
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METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
by
SHAH
,
VINAY
,
K
,
HUDGENS, JEFFREY, C
Year of Publication
30.04.2009
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METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
by
SHAH VINAY K
,
HUDGENS JEFFREY C
Year of Publication
23.04.2009
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