Pattern Displacement Error under Off Axis Illumination
Seong, Nakgeuon, Kang, Hoyoung, Kye, Jongwook, Cho, Hanku, Moon, Jootae
Published in Japanese Journal of Applied Physics (01.12.1998)
Published in Japanese Journal of Applied Physics (01.12.1998)
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Journal Article
Pattern Displacement Error Under Off-Axis Illumination
Nakgeuon Seong, Jongwook Kye, Hoyoung Kang, Jootae Moon
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)
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Conference Proceeding
ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE
BENDIK, Joseph, J, FARRAR, Nigel, R, LALOVIC, Ivan, B, RAFAC, Robert, J, SEONG, Nakgeuon
Year of Publication 23.01.2019
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Year of Publication 23.01.2019
Patent
ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE
BENDIK, Joseph, J, FARRAR, Nigel, R, LALOVIC, Ivan, B, RAFAC, Robert, J, SEONG, Nakgeuon
Year of Publication 27.12.2017
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Year of Publication 27.12.2017
Patent
Active spectral control of optical source
RAFAC ROBERT J, BENDIK JOSEPH J, LALOVIC IVAN B, SEONG NAKGEUON, FARRAR NIGEL R
Year of Publication 27.08.2013
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Year of Publication 27.08.2013
Patent
Fast method to model photoresist images using focus blur and resist blur
Brunner, Timothy A, Gallatin, Gregg M, Gordon, Ronald L, Lai, Kafai, Rosenbluth, Alan E, Seong, Nakgeuon
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
Fast method to model photoresist images using focus blur and resist blur
LAI KAFAI, GORDON RONALD L, BRUNNER TIMOTHY A, SEONG NAKGEUON, ROSENBLUTH ALAN E, GALLATIN GREGG M
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
ACTIVE SPECTRAL CONTROL OF OPTICAL SOURCE
BENDIK, JOSEPH, J, LALOVIC, IVAN, B, RAFAC, ROBERT, J, FARRAR, NIGEL, R, SEONG, NAKGEUON
Year of Publication 04.07.2012
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Year of Publication 04.07.2012
Patent
HOCHPRODUZIERBARE SRAM-ZELLEN IN SUBSTRATEN MIT HYBRID-KRISTALLORIENTIERUNG
GLUSCHENKOV, OLEG, COSTRINI, GREGORY, SEONG, NAKGEUON, LEONG, MEIKEI, DORIS, BRUCE
Year of Publication 15.04.2009
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Year of Publication 15.04.2009
Patent
HIGHLY MANUFACTURABLE SRAM CELLS IN SUBSTRATES WITH HYBRID CRYSTAL ORIENTATION
GLUSCHENKOV, OLEG, COSTRINI, GREGORY, SEONG, NAKGEUON, LEONG, MEIKEI, DORIS, BRUCE
Year of Publication 01.04.2009
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Year of Publication 01.04.2009
Patent