Lithography apparatus
Van Hal, Paulus Albertus, Koevoets, Adrianus Hendrik, Seoane De La Cuesta, Beatriz
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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Substrates, lithographic apparatuses, methods of loading a substrate, methods of coating a backside surface of the substrate, methods of providng a friction switch, and methods of fabricating a device
VAN HAL, PAULUS ALBERTUS, KOEVOETS, ADRIANUS HENDRIK, SEOANE DE LA CUESTA, BEATRIZ
Year of Publication 11.07.2022
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Year of Publication 11.07.2022
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Improved lithography apparatus
VAN HAL, PAULUS ALBERTUS, KOEVOETS, ADRIANUS HENDRIK, SEOANE DE LA CUESTA, BEATRIZ
Year of Publication 01.09.2021
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Year of Publication 01.09.2021
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METHODS FOR PROTECTING A SUBSTRATE HOLDER AND APPARATUSES FOR MANUFACTURING DEVICES
VAN KUILENBURG, JULIEN, TROMP, SIEGFRIED ALEXANDER, VAN HAL, PAULUS ALBERTUS, STEVENS, LUCAS HENRICUS JOHANNES, BECKERS, JOHAN FRANCISCUS MARIA, STEL, BART WILLEM, KOEVOETS, ADRIANUS HENDRIK, ACHANTA, SATISH, DAVIES, DYLAN JOHN DAVID, SEOANE DE LA CUESTA, BEATRIZ
Year of Publication 11.07.2022
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Year of Publication 11.07.2022
Patent
Improved lithography methods
VAN KUILENBURG, JULIEN, TROMP, SIEGFRIED ALEXANDER, VAN HAL, PAULUS ALBERTUS, STEVENS, LUCAS HENRICUS JOHANNES, BECKERS, JOHAN FRANCISCUS MARIA, STEL, BART WILLEM, KOEVOETS, ADRIANUS HENDRIK, ACHANTA, SATISH, DAVIES, DYLAN JOHN DAVID, SEOANE DE LA CUESTA, BEATRIZ
Year of Publication 16.08.2021
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Year of Publication 16.08.2021
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개선된 리소그래피 장치
KOEVOETS ADRIANUS HENDRIK, VAN HAL PAULUS ALBERTUS, SEOANE DE LA CUESTA BEATRIZ
Year of Publication 17.08.2022
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Year of Publication 17.08.2022
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