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DE JONGH, ROBERTUS JOHANNES MARINUS, SENGERS, TIMOTHEUS FRANCISCUS, DE BOEIJ, WILHELMUS PETRUS, LOOPSTRA, ERIK ROELOF, VAN SCHOOT, JAN BERNARD PLECHELMUS, JANSSEN, FRANCISCUS JOHANNES JOSEPH, BUTLER, HANS
Year of Publication 21.12.2013
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Year of Publication 21.12.2013
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A sensor for use in a lithographic apparatus
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Year of Publication 30.08.2006
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Year of Publication 30.08.2006
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Lithographic apparatus and device manufacturing method
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Year of Publication 11.07.2006
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Year of Publication 11.07.2006
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Derksen, Antonius Theodorus Anna Maria, Donders, Sjoerd Nicolaas Lambertus, Hoogendam, Christiaan Alexander, Lof, Joeri, Loopstra, Erik Roelof, Mertens, Jeroen Johannes Sophia Maria, Mulkens, Johannes Catharinus Hubertus, Sengers, Timotheus Franciscus, Straaijer, Alexander, Streefkerk, Bob
Year of Publication 11.07.2006
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Year of Publication 11.07.2006
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Lithographic apparatus and device manufacturing method
BOOGAARD ARJEN, SENGERS TIMOTHEUS FRANCISCUS, JANSEN HANS, DONDERS SJOERD NICOLAAS LAMBER
Year of Publication 09.12.2009
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Year of Publication 09.12.2009
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Lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, DONDERS SJOERD NICOLAAS LAMBERTUS, DERKSEN ANTONIUS THEODORUS ANNA MARIA, STREEFKERK BOB, LOF JOERI, MERTENS JEROEN JOHANNES SOPHIA MARIA
Year of Publication 26.05.2006
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Year of Publication 26.05.2006
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Immersion lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, STRAAIJER ALEXANDER, SENGERS TIMOTHEUS FRANCISCUS, MULKENS JOHANNES CATHARINUS HU, DERKSEN ANTONIUS THEODORUS ANN, MERTENS JEROEN JOHANNES SOPHIA, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBER, STREEFKERK BOB, LOF JOERI
Year of Publication 24.07.2013
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Year of Publication 24.07.2013
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LITHOGRAPHIC PROJECTION APPARATUS
SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, RITSEMA ROELOF AEILKO SIEBRAND, VAN SANTEN HELMAR, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, STREEFKERK BOB, BIJLAART ERIK THEODORUS MARIA, SIMON KLAUS, LOOPSTRA ERIK ROELOF, KOLESNYCHENKO ALEKSEY, MERTENS JEROEN JOHANNES SOPHIA M, DONDERS SJOERD NICOLAAS LAMBERTUS, LOF JOERI, SCHAIK FRANK VAN, DE SMIT JOHANNES THEODOOR, MEIJER HENDRICUS JOHANNES MARIA
Year of Publication 16.08.2007
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Year of Publication 16.08.2007
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LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURING A DEVICE
SENGERS, TIMOTHEUS FRANCISCUS, LEVASIER, LEON MARTIN, VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, JANSEN, ROB, BOX, WILHELMUS JOSEPHUS, VAN LOENHOUT, ELKE, VAN EMPEL, TJARKO ADRIAAN RUDOLF, LOOPSTRA, ERIK ROELOF, OUWEHAND, LUBERTHUS, VAN DEN SCHOOR, LEON JOSEPH MARIE, MUITJES, MARCEL JOHANNUS ELISABETH HUBERTUS, BECKERS, MARCEL
Year of Publication 30.07.2007
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Year of Publication 30.07.2007
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LEVASIER LEON MARTIN, SENGERS TIMOTHEUS FRANCISCUS, BECKERS MARCEL, VAN EMPEL TJARKO ADRIAAN RUDOLF, LOOPSTRA ERIK R, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, BOX WILHELMUS JOSEPHUS, VAN LOENHOUT ELKE, OUWEHAND LUBERTHUS, MUITJES MARCEL JOHANNUS ELISABETH HUBERTUS, VAN DER SCHOOR LEON JOSEPH MARIE, JANSEN ROB
Year of Publication 19.07.2007
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Year of Publication 19.07.2007
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LEVASIER LEON MARTIN, LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, BECKERS MARCEL, VAN EMPEL TJARKO ADRIAAN RUDOLF, VAN DEN SCHOOR LEON JOSEPH MARIE, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, BOX WILHELMUS JOSEPHUS, VAN LOENHOUT ELKE, OUWEHAND LUBERTHUS, MUITJES MARCEL JOHANNUS ELISABETH HUBERTUS, JANSEN ROB
Year of Publication 27.06.2007
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Year of Publication 27.06.2007
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Lithographic apparatus and method for manufacturing a device
SENGERS, TIMOTHEUS FRANCISCUS, LEVASIER, LEON MARTIN, VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, JANSEN, ROB, BOX, WILHELMUS JOSEPHUS, VAN LOENHOUT, ELKE, VAN EMPEL, TJARKO ADRIAAN RUDOLF, LOOPSTRA, ERIK ROELOF, OUWEHAND, LUBERTHUS, MUITJES, MARCEL JOHANNUS ELISABETH HUBERTUS, BECKERS, MARCEL, VAN DER SCHOOR, LEON JOSEPH MARIE
Year of Publication 27.06.2007
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Year of Publication 27.06.2007
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Immersion lithographic apparatus and device manufacturing method
SENGERS, TIMOTHEUS FRANCISCUS, LOOPSTRA, ERIK ROELOF, STREEFKERK, BOB, DONDERS, SJOERD NICOLAAS LAMBERTUS, MULKENS, JOHANNES CATHARINUS HUBERTUS, LOF, JOERI, STRAAIJER, ALEXANDER, DERKSEN, ANTONIUS THEODORUS ANNA MARIA, HOOGENDAM, CHRISTIAAN ALEXANDER, MERTENS, JEROEN JOHANNES SOPHIA MARIA
Year of Publication 10.08.2005
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Year of Publication 10.08.2005
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Lithographic apparatus and device manufacturing method
SENGERS TIMOTHEUS FRANCISCUS, VAN DE KERKHOF MARCUS ADRIANUS, KROON MARK, VAN WEERT KEES
Year of Publication 11.03.2009
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Year of Publication 11.03.2009
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Lithographic apparatus and device manufacturing method
VAN SCHAIK FRANK, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, RITSEMA ROELOF AEILKO SIEBRAND, VAN SANTEN HELMAR, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, STREEFKERK BOB, BIJLAART ERIK THEODORUS MARIA, SIMON KLAUS, MERTENS JEROEN JOHANNES SOPHIA MARIA, LOOPSTRA ERIK ROELOF, DONDERS SJOERD NICOLAAS LAMBERTUS, DE SMIT JOANNES THEODOOR, LOF JOERI, KOLESNYCHENKO ALEKSEY YURIEVICH, MEIJER HENDRICUS JOHANNES MARIA
Year of Publication 03.04.2007
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Year of Publication 03.04.2007
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Lithographic apparatus and device manufacturing method
Lof, Joeri, Bijlaart, Erik Theodorus Maria, Butler, Hans, Donders, Sjoerd Nicolaas Lambertus, Hoogendam, Christiaan Alexander, Kolesnychenko, Aleksey Yurievich, Loopstra, Erik Roelof, Meijer, Hendricus Johannes Maria, Mertens, Jeroen Johannes Sophia Maria, Mulkens, Johannes Catharinus Hubertus, Ritsema, Roelof Aeilko Siebrand, Van Schaik, Frank, Sengers, Timotheus Franciscus, Simon, Klaus, De Smit, Joannes Theodoor, Straaijer, Alexander, Streefkerk, Bob, Van Santen, Helmar
Year of Publication 03.04.2007
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Year of Publication 03.04.2007
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LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
VAN SCHAIK FRANK, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, RITSEMA ROELOF AEILKO SIEBRAND, VAN DE KERKHOF MARCUS ADRIANUS, DEN BOEF ARIE JEFFREY, CHRISTIAAN ALEXANDER HOOGENDAM, VAN SANTEN HELMAR, BUTLER HANS, MULKENS JOHANNES CATHARINUS HUBERTUS, JOERI LOF, STREEFKERK BOB, BIJLAART ERIK THEODORUS MARIA, SIMON KLAUS, MERTENS JEROEN JOHANNES SOPHIA MARIA, LOOPSTRA ERIK ROELOF, OTTENS JOOST JEROEN, KOLESNYCHENKO ALEKSEY, KROON MARK, DONDERS SJOERD NICOLAAS LAMBERTUS, DE SMIT JOANNES THEODOOR, MEIJER HENDRICUS JOHANNES MARIA
Year of Publication 13.09.2007
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Year of Publication 13.09.2007
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Lithographic apparatus and device manufacturing method
MARIA DERKSEN ANTONIUS THEODORUS ANNA, LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, MARIA MERTENS JEROEN JOHANNES SOPHIA, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, DONDERS SJOERD NICOLAAS LAMBERTUS, STREEFKERK BOB, LOF JOERI
Year of Publication 28.10.2004
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Year of Publication 28.10.2004
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