Characterization of half-pitch 15-nm metal wire circuit fabricated by directed self-assembly of polystyrene-block-poly(methyl methacrylate)
Kasahara, Yusuke, Seino, Yuriko, Sato, Hironobu, Kanai, Hideki, Kobayashi, Katsutoshi, Kubota, Hitoshi, Miyagi, Ken, Minegishi, Shinya, Kodera, Katsuyoshi, Kihara, Naoko, Nomura, Satoshi, Tobana, Toshikatsu, Shiraishi, Masayuki, Kawamonzen, Yoshiaki, Azuma, Tsukasa
Published in Microelectronic engineering (15.06.2016)
Published in Microelectronic engineering (15.06.2016)
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Journal Article
Precise Synthesis of Fluorine-containing Block Copolymers via RAFT
Nakatani, Ryuichi, Takano, Hiroki, Wang, Lei, Chandra, Alvin, Tanaka, Yuki, Maeda, Rina, Kihara, Naoko, Minegishi, Shinya, Miyagi, Ken, Kasahara, Yusuke, Sato, Hironobu, Seino, Yuriko, Azuma, Tsukasa, Ober, Christopher K., Hayakawa, Teruaki
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
Vertical Oriented Lamellar Formation of Fluorine- and Silicon-containing Block Copolymers without Neutral Layers
Takano, Hiroki, Wang, Lei, Tanaka, Yuki, Maeda, Rina, Kihara, Naoko, Seino, Yuriko, Sato, Hironobu, Kawamonzen, Yoshiaki, Miyagi, Ken, Minegishi, Shinya, Azuma, Tsukasa, Ober, Christopher K., Hayakawa, Teruaki
Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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Journal Article
Fabrication of Sub-10 nm Metal Wire Circuits using Directed Self-Assembly of Block Copolymers
Azuma, Tsukasa, Seino, Yuriko, Sato, Hironobu, Kasahara, Yusuke, Kobayashi, Katsutoshi, Kubota, Hitoshi, Kanai, Hideki, Kodera, Katsuyoshi, Kihara, Naoko, Kawamonzen, Yoshiaki, Minegishi, Shinya, Miyagi, Ken, Yamano, Hitoshi, Tobana, Toshikatsu, Shiraishi, Masayuki, Nomura, Satoshi
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
A novel simple sub-15nm line-and-space patterning process flow using directed self-assembly technology
Seino, Yuriko, Kasahara, Yusuke, Sato, Hironobu, Kobayashi, Katsutoshi, Miyagi, Ken, Minegishi, Shinya, Kodera, Katsuyoshi, Kanai, Hideki, Tobana, Toshikatsu, Kihara, Naoko, Fujiwara, Tomoharu, Hirayanagi, Noriyuki, Kawamonzen, Yoshiaki, Azuma, Tsukasa
Published in Microelectronic engineering (01.02.2015)
Published in Microelectronic engineering (01.02.2015)
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Journal Article
A Simulation Study on Defectivity in Directed Self-assembly Lithography
Kodera, Katsuyoshi, Kanai, Hideki, Sato, Hironobu, Seino, Yuriko, Kobayashi, Katsutoshi, Kasahara, Yusuke, Kubota, Hitoshi, Kihara, Naoko, Kawamonzen, Yoshiaki, Minegishi, Shinya, Miyagi, Ken, Shiraishi, Masayuki, Tobana, Toshikatsu, Nomura, Satoshi, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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Journal Article
Electrical Via Chain Yield for DSA Contact Hole Shrink Process
Kato, Hirokazu, Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kobayashi, Katsutoshi, Kawanishi, Ayako, Imamura, Tsubasa, Omura, Mitsuhiro, Nakamura, Naofumi, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2013)
Published in Journal of Photopolymer Science and Technology (01.01.2013)
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Journal Article
The Photopolymer Science and Technology Award
Takano, Hiroki, Wang, Lei, Tanaka, Yuki, Maeda, Rina, Kihara, Naoko, Seino, Yuriko, Sato, Hironobu, Kawamonzen, Yoshiaki, Miyagi, Ken, Minegishi, Shinya, Azuma, Tsukasa, Ober, Christopher K., Hayakawa, Teruaki
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
Sub-30nm via interconnects fabricated using directed self-assembly
Kato, Hirokazu, Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kobayashi, Katsutoshi, Kawanishi, Ayako, Imamura, Tsubasa, Omura, Mitsuhiro, Nakamura, Naofumi, Azuma, Tsukasa
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Journal Article
Application of Directed Self-Assembly Lithography to Semiconductor Device Manufacturing Process
SEINO, YURIKO, KATO, HIROKAZU, YONEMITSU, HIROKI, SATO, HIRONOBU, KANNO, MASAHIRO, KOBAYASHI, KATSUTOSHI, KAWANISHI, AYAKO, AZUMA, TSUKASA
Published in Electronics and communications in Japan (01.04.2015)
Published in Electronics and communications in Japan (01.04.2015)
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Journal Article
A Challenge to the Micro-phase Separation Limit of PS-b-PMMA by Doping with Hydrophilic Materials
Kawamonzen, Yoshiaki, Kihara, Naoko, Seino, Yuriko, Sato, Hironobu, Kasahara, Yusuke, Kobayashi, Katsutoshi, Kodera, Katsuyoshi, Kanai, Hideki, Kubota, Hitoshi, Miyagi, Ken, Minegishi, Shinya, Tobana, Toshikatsu, Shiraishi, Masayuki, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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Journal Article
Resist Residue in Ion Implantation Level Lithography
Ojima, Tomoko, Asano, Masafumi, Takahashi, Masanori, Seino, Yuriko, Mimotogi, Shoji
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Blockcopolymer Self-Assembly Directed by Photochemically Attached Polymer Surface Layer
Hattori, Shigeki, Asakawa, Koji, Mikoshiba, Satoshi, Nakamura, Hiroko, Hieno, Atsushi, Seino, Yuriko, Kanno, Mashiro, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2011)
Published in Journal of Photopolymer Science and Technology (01.01.2011)
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Journal Article
The Photopolymer Science and Technology Award
Kato, Hirokazu, Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kobayashi, Katsutoshi, Kawanishi, Ayako, Imamura, Tsubasa, Omura, Mitsuhiro, Nakamura, Naofumi, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2014)
Published in Journal of Photopolymer Science and Technology (01.01.2014)
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Journal Article
Quick Formation of DSA Neutralization Polymer Layer Attached by Reactive Self-Assembled Monolayer
Hieno, Atsushi, Hattori, Shigeki, Nakamura, Hiroko, Asakawa, Koji, Seino, Yuriko, Kanno, Masahiro, Azuma, Tsukasa
Published in Journal of Photopolymer Science and Technology (01.01.2012)
Published in Journal of Photopolymer Science and Technology (01.01.2012)
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Journal Article
Perpendicular Orientation Control without Interfacial Treatment of RAFT-Synthesized High‑χ Block Copolymer Thin Films with Sub-10 nm Features Prepared via Thermal Annealing
Nakatani, Ryuichi, Takano, Hiroki, Chandra, Alvin, Yoshimura, Yasunari, Wang, Lei, Suzuki, Yoshinori, Tanaka, Yuki, Maeda, Rina, Kihara, Naoko, Minegishi, Shinya, Miyagi, Ken, Kasahara, Yuusuke, Sato, Hironobu, Seino, Yuriko, Azuma, Tsukasa, Yokoyama, Hideaki, Ober, Christopher K, Hayakawa, Teruaki
Published in ACS applied materials & interfaces (20.09.2017)
Published in ACS applied materials & interfaces (20.09.2017)
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Journal Article
Methemoglobin Formation in Hemoglobin Vesicles and Reduction by Encapsulated Thiols
Takeoka, Shinji, Sakai, Hiromi, Kose, Takehiro, Mano, Yuichi, Seino, Yuriko, Nishide, Hiroyuki, Tsuchida, Eishun
Published in Bioconjugate chemistry (01.07.1997)
Published in Bioconjugate chemistry (01.07.1997)
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Journal Article
Direct In Situ Observation of the Early‐Stage Disorder–Order Evolution of Perpendicular Lamellae in Thermally Annealed High‐χ Block Copolymer Thin Films
Chandra, Alvin, Nakatani, Ryuichi, Uchiyama, Takumi, Seino, Yuriko, Sato, Hironobu, Kasahara, Yusuke, Azuma, Tsukasa, Hayakawa, Teruaki
Published in Advanced materials interfaces (01.06.2019)
Published in Advanced materials interfaces (01.06.2019)
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Journal Article
Self‐Assembly: Direct In Situ Observation of the Early‐Stage Disorder–Order Evolution of Perpendicular Lamellae in Thermally Annealed High‐χ Block Copolymer Thin Films (Adv. Mater. Interfaces 11/2019)
Chandra, Alvin, Nakatani, Ryuichi, Uchiyama, Takumi, Seino, Yuriko, Sato, Hironobu, Kasahara, Yusuke, Azuma, Tsukasa, Hayakawa, Teruaki
Published in Advanced materials interfaces (07.06.2019)
Published in Advanced materials interfaces (07.06.2019)
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