Impact of Channel Thickness on the NBTI Behaviors in the Ge-OI pMOSFETs with Al2O3/GeOx Gate Stacks
Sun, Yu, Schwarzenbach, Walter, Yuan, Sicong, Chen, Zhuo, Yang, Yanbin, Nguyen, Bich-Yen, Gao, Dawei, Zhang, Rui
Published in IEEE journal of the Electron Devices Society (01.01.2023)
Published in IEEE journal of the Electron Devices Society (01.01.2023)
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Journal Article
(Invited) SOI-Type Bonded Structures for Advanced Technology Nodes
Widiez, Julie, Hartmann, Jean-Michel, Mazen, Frédéric, Sollier, Sébastien, Veytizou, Christelle, Bogumilowicz, Yann, Augendre, Emmanuel, Martin, Mickael, Gonzatti, Frédéric, Roure, Marie-Christine, Duvernay, Julien, Loup, Virginie, Euvrard-Colnat, Catherine, Seignard, Aurélien, Baron, Thierry, Cipro, Romain, Bassani, Franck, Papon, Anne-Marie, Guedj, Cyril, Huyet, Isabelle, Rivoire, Maurice, Besson, Pascal, Figuet, Christophe, Schwarzenbach, Walter, Delprat, Daniel, Signamarcheix, Thomas
Published in ECS transactions (14.08.2014)
Published in ECS transactions (14.08.2014)
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Journal Article
Comprehensive Understanding of the Mobility Scattering Mechanisms and Evaluation of the Universal Mobility in Ultra-Thin-Body Ge-OI p-and n-MOSFETs
Su, Rui, Chen, Zhuo, Ke, Mengnan, Gao, Dawei, Schwarzenbach, Walter, Nguyen, Bich-Yen, Li, Junkang, Zhang, Rui
Published in IEEE transactions on electron devices (01.10.2024)
Published in IEEE transactions on electron devices (01.10.2024)
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Journal Article
Proven Power Cycling Reliability of Ohmic Annealing Free SiC Power Device through the Use of SmartSiCTM Substrate
Erlbacher, Tobias, Leib, Jürgen, Becker, Tom, Hellinger, Carsten, Guiot, Eric, Allibert, Frédéric, Schwarzenbach, Walter, Rouchier, Séverin
Published in Materials science forum (06.06.2023)
Published in Materials science forum (06.06.2023)
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Journal Article
High Sensitivity Surface Defect Inspection of SiC and SmartSiCTM Substrates Using a DUV Laser-Based System
Shrestha, Ramesh, Schwarzenbach, Walter, Simpson, Gavin, Daval, Nicolas, Cela, Enrica, Shahidi, Sam, Parangi, Prasant, Chapelle, Audrey, Rouchier, Séverin, Widiez, Julie
Published in Diffusion and defect data. Solid state data. Pt. A, Defect and diffusion forum (31.05.2023)
Published in Diffusion and defect data. Solid state data. Pt. A, Defect and diffusion forum (31.05.2023)
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개선된 전기적 속성들을 갖는 탄화규소로 만들어진 작업 층을 포함하는 반도체 구조체의 제조 프로세스
DROUIN ALEXIS, ROUCHIER SEVERIN, GAUDIN GWELTAZ, ROLLAND EMMANUEL, WIDIEZ JULIE, SCHWARZENBACH WALTER
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
Patent
Evaluation of Crystal Quality and Dopant Activation of Smart CutTM - Transferred 4H-SiC Thin Film
Berre, Guillaume, Moulin, Alexandre, Amalbert, Vincent, Gergaud, Patrice, Mony, Karine, Troutot, Nicolas, Rolland, Emmanuel, Rouchier, Séverin, Gelineau, Guillaume, Widiez, Julie, Schwarzenbach, Walter, Boulet, Romain, Mariolle, Denis, Vladimirova, Krenema, Bogumilowicz, Yann, Prudkovskiy, Vladimir S., Barbet, Sophie, Lapertot, Gérard
Published in Materials science forum (26.05.2023)
Published in Materials science forum (26.05.2023)
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Journal Article
Strained Silicon-on-Insulator Platform for Co-Integration of Logic and RF-Part II: Comb-Like Device Architecture
Liang, Jie, Sun, Chen, Xu, Haiwen, Kong, Eugene Y.-J., Nguyen, Bich-Yen, Schwarzenbach, Walter, Maleville, Christophe, Berthelon, Remy, Weber, Olivier, Arnaud, Franck, Thean, Aaron V.-Y., Gong, Xiao
Published in IEEE transactions on electron devices (01.04.2022)
Published in IEEE transactions on electron devices (01.04.2022)
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Journal Article
SiC engineered substrate: increasing SiC MOSFETs current density from device to module level
Guiot, Eric, Allibert, Frederic, Leib, Jurgen, Becker, Tom, Drouin, Alexis, Schwarzenbach, Walter
Published in 2024 IEEE Applied Power Electronics Conference and Exposition (APEC) (25.02.2024)
Published in 2024 IEEE Applied Power Electronics Conference and Exposition (APEC) (25.02.2024)
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Conference Proceeding
Ultra-thin body & buried oxide SOI substrate development and qualification for Fully Depleted SOI device with back bias capability
Schwarzenbach, Walter, Nguyen, Bich-Yen, Allibert, Frederic, Girard, Christophe, Maleville, Christophe
Published in Solid-state electronics (01.03.2016)
Published in Solid-state electronics (01.03.2016)
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Journal Article
Impact of Channel Thickness on the NBTI Behaviors in the Ge-OI pMOSFETs With Al 2 O 3 /GeO x Gate Stacks
Sun, Yu, Schwarzenbach, Walter, Yuan, Sicong, Chen, Zhuo, Yang, Yanbin, Nguyen, Bich-Yen, Gao, Dawei, Zhang, Rui
Published in IEEE journal of the Electron Devices Society (2023)
Published in IEEE journal of the Electron Devices Society (2023)
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Journal Article
High sensitivity surface defect inspection of SiC and smartSiC substrates using a DUV laser-based system
Cela, Enrica, Shahidi, Sam, Parangi, Prasant, Shrestha, Ramesh, Simpson, Gavin, Widiez, Julie, Daval, Nicolas, Chapelle, Audrey, Rouchier, Séverin, Schwarzenbach, Walter
Published in Diffusion and defect data. Solid state data. Pt. A, Defect and diffusion forum (31.05.2023)
Published in Diffusion and defect data. Solid state data. Pt. A, Defect and diffusion forum (31.05.2023)
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Journal Article