Complex Electron Heating in Capacitive Multi-Frequency Plasmas
Schulze, Julian, Schungel, Edmund, Derzsi, Aranka, Korolov, Ihor, Mussenbrock, Thomas, Donko, Zoltan
Published in IEEE transactions on plasma science (01.10.2014)
Published in IEEE transactions on plasma science (01.10.2014)
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Journal Article
Dust Hour Glass in a Capacitive RF Discharge
Iwashita, Shinya, Schüngel, Edmund, Schulze, Julian, Hartmann, Peter, Donkó, Zoltán, Uchida, Giichiro, Koga, Kazunori, Shiratani, Masaharu, Czarnetzki, Uwe
Published in IEEE transactions on plasma science (01.10.2014)
Published in IEEE transactions on plasma science (01.10.2014)
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Journal Article
Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas
Liu, Yong-Xin, Schüngel, Edmund, Korolov, Ihor, Donkó, Zoltán, Wang, You-Nian, Schulze, Julian
Published in Physical review letters (24.06.2016)
Published in Physical review letters (24.06.2016)
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Journal Article
Power supply and impedance matching to drive technological radio-frequency plasmas with customized voltage waveforms
Franek, James, Brandt, Steven, Berger, Birk, Liese, Martin, Barthel, Matthias, Schüngel, Edmund, Schulze, Julian
Published in Review of scientific instruments (01.05.2015)
Published in Review of scientific instruments (01.05.2015)
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Journal Article
Evaluation of the Electrical Asymmetry Effect by spectroscopic measurements of capacitively coupled discharges and silicon thin film depositions
Schüngel, Edmund, Hofmann, Robert, Mohr, Sebastian, Schulze, Julian, Röpcke, Jürgen, Czarnetzki, Uwe
Published in Thin solid films (01.01.2015)
Published in Thin solid films (01.01.2015)
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Journal Article
Electron heating modes and frequency coupling effects in dual-frequency capacitive CF4 plasmas
Derzsi, Aranka, Schüngel, Edmund, Donkó, Zoltán, Schulze, Julian
Published in Open Chemistry (01.01.2015)
Published in Open Chemistry (01.01.2015)
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Journal Article
Sheath-to-sheath transport of dust particles in a capacitively coupled discharge
Iwashita, Shinya, Uchida, Giichiro, Schulze, Julian, Schüngel, Edmund, Hartmann, Peter, Shiratani, Masaharu, Donkó, Zoltán, Czarnetzki, Uwe
Published in Plasma sources science & technology (01.06.2012)
Published in Plasma sources science & technology (01.06.2012)
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Journal Article
기판의 스퍼터 코팅 방법 또는 스퍼터 코팅 기판의 제조방법 및 장치
SCHUNGEL EDMUND, SCHWYN THONY SILVIA, GEES SILVIO, PADRUN MARCO, GOOD ROMEO
Year of Publication 17.08.2022
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Year of Publication 17.08.2022
Patent
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
Liu, Yong-Xin, Korolov, Ihor, Schüngel, Edmund, Wang, You-Nian, Donkó, Zoltán, Schulze, Julian
Published in Plasma sources science & technology (20.04.2017)
Published in Plasma sources science & technology (20.04.2017)
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