Patterning device cooling apparatus
Schultz, Geoffrey Alan, Van Boxtel, Frank Johannes Jacobus, Baker, Lowell Lane, Cekli, Hakki Ergün, Ward, Christopher Charles, Nakíbo{hacek over (g)}lu, Güneş, Van Bokhoven, Laurentius Johannes Adrianus, Van Damme, Jean-Philippe Xavier, Bloks, Ruud Hendrikus Martinus Johannes
Year of Publication 05.05.2020
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Year of Publication 05.05.2020
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PATTERNING DEVICE COOLING APPARATUS
Baker, Lowell Lane, BLOKS, Ruud Hendrikus Martinus Johannes, SCHULTZ, Geoffrey Alan, CEKLI, Hakki Ergun, VAN DAMME, Jean-Philippe Xavier, NAKÍBOGLU, Günes, VAN BOKHOVEN, Laurentius Johannes Adrianus, WARD, Christopher Charles, VAN BOXTEL, Frank Johannes Jacobus
Year of Publication 14.11.2019
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Year of Publication 14.11.2019
Patent
PATTERNING DEVICE COOLING APPARATUS
BAKER, Lowell Lane, BLOKS, Ruud Hendrikus Martinus Johannes, SCHULTZ, Geoffrey Alan, CEKLI, Hakki Ergün, VAN DAMME, Jean-Philippe Xavier, VAN BOKHOVEN, Laurentius Johannes Adrianus, WARD, Christopher Charles, NAKIBOGLU, Günes, VAN BOXTEL, Frank Johannes Jacobus
Year of Publication 25.04.2019
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Year of Publication 25.04.2019
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Reticle Cooling by Non-Uniform Gas Flow
DELPUERTO Santiago E, WARD Christopher Charles, VOGEL Herman, SCHULTZ Geoffrey Alan, BURBANK Daniel Nathan, VAN BOKHOVEN Laurentius Johannes Adrianus, ONVLEE Johannes, VENTURINO Thomas, GALBURT Daniel Nicholas
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
Patent
Patterning device cooling apparatus
Schultz, Geoffrey Alan, Van Boxtel, Frank Johannes Jacobus, Baker, Lowell Lane, Cekli, Hakki Ergün, Ward, Christopher Charles, Nak{dot over (i)}bo{hacek over (g)}lu, Güneş, Van Bokhoven, Laurentius Johannes Adrianus, Van Damme, Jean-Philippe Xavier, Bloks, Ruud Hendrikus Martinus Johannes
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
Patent
PATTERNING DEVICE COOLING APPARATUS
HAKKI ERGÜN CEKLI, CHRISTOPHER CHARLES WARD, LOWELL LANE BAKER, FRANK JOHANNES JACOBUS VAN BOXTEL, LAURENTIUS JOHANNES ADRIANUS VAN BOKHOVEN, RUUD HENDRIKUS MARTINUS JOHANNES BLOKS, JEAN-PHILIPPE XAVIER VAN DAMME, GÜNES NAKIBOGLU, GEOFFREY ALAN SCHULTZ
Year of Publication 12.10.2017
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Year of Publication 12.10.2017
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PATTERNING DEVICE COOLING APPARATUS
CEKLI, Hakki, Ergün, VAN DAMME, Jean-Philippe, Xavier, WARD, Christopher, Charles, BLOKS, Ruud, Hendrikus, Martinus, Johannes, SCHULTZ, Geoffrey, Alan, VAN BOXTEL, Frank, Johannes, Jacobus, VAN BOKHOVEN, Laurentius, Johannes, Adrianus, NAKIBOGLU, Günes, BAKER, Lowell
Year of Publication 12.10.2017
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Year of Publication 12.10.2017
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