Method For Structuring A Substrate Using Multiple Exposure
MAUL MANFRED, GRAEUPNER PAUL, WEGMANN ULRICH, REISINGER GERD, SCHRIEVER MARTIN, GOEHNERMEIER AKSEL
Year of Publication 14.02.2008
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Year of Publication 14.02.2008
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Measuring system for measuring an imaging quality of an EUV lens
DEGUENTHER MARKUS, HAIDNER HELMUT, FRESE RALF, SCHRIEVER MARTIN, SAMANIEGO MICHAEL, HOCH RAINER
Year of Publication 10.12.2014
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Year of Publication 10.12.2014
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Verfahren zur Strukturierung eines Substrats durch Mehrfachbelichtung
GOEHNERMEIER, AKSEL, WEGMANN, ULRICH, SCHRIEVER, MARTIN, MAUL, MANFRED, GRAEUPNER, PAUL, REISINGER, GERD
Year of Publication 24.05.2007
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Year of Publication 24.05.2007
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METHOD FOR PATTERNING A SUBSTRATE USING MULTIPLE EXPOSURE
MAUL MANFRED, GRAUPNER PAUL, GOHNERMEIER AKSEL, WEGMANN ULRICH, REISINGER GERD, SCHRIEVER MARTIN
Year of Publication 23.04.2007
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Year of Publication 23.04.2007
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