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"SCHONAUER, DIANA, MARIE"
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CHEMICAL-MECHANICAL POLISHING SLURRY FORMULATION AND METHOD FOR TUNGSTEN AND TITANIUM THIN FILMS
by
AVANZINO, STEPHEN, C
,
WOO, CHRISTY, MEIU
,
SCHONAUER
,
DIANA
,
MARIE
,
BURKE, PETER, AUSTIN
Year of Publication
24.09.2003
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CHEMICAL-MECHANICAL POLISHING SLURRY FORMULATION AND METHOD FOR TUNGSTEN AND TITANIUM THIN FILMS
by
AVANZINO, STEPHEN, C
,
WOO, CHRISTY, MEIU
,
SCHONAUER
,
DIANA
,
MARIE
,
BURKE, PETER, AUSTIN
Year of Publication
12.01.2000
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Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films
by
WOO; CHRISTY MEIU
,
SCHONAUER
;
DIANA MARIE
,
BURKE; PETER AUSTIN
,
AVANZINO; STEVEN C
Year of Publication
29.06.1999
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CHEMICAL-MECHANICAL POLISHING SLURRY FORMULATION AND METHOD FOR TUNGSTEN AND TITANIUM THIN FILMS
by
AVANZINO, STEPHEN, C
,
WOO, CHRISTY, MEIU
,
SCHONAUER
,
DIANA
,
MARIE
,
BURKE, PETER, AUSTIN
Year of Publication
01.10.1998
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CHEMICAL-MECHANICAL POLISHING SLURRY FORMULATION AND METHOD FOR TUNGSTEN AND TITANIUM THIN FILMS
by
AVANZINO, STEPHEN, C
,
WOO, CHRISTY, MEIU
,
SCHONAUER
,
DIANA
,
MARIE
,
BURKE, PETER, AUSTIN
Year of Publication
01.10.1998
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Patent
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