Measuring Flow Profiles and Slip by Single Molecule Tracking Experiments in Thin Liquid Films
Schob, Arne, Pumpa, Martin, Selmke, Markus, Cichos, Frank
Published in Journal of physical chemistry. C (18.03.2010)
Published in Journal of physical chemistry. C (18.03.2010)
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Journal Article
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
HODENBERG, MARTIN VON, RUDOLPH, GUENTER, SCHNEIDER, SONJA, WABRA, NORBERT, ZELLNER, JOHANNES, SCHNEIDER, RICARDA, SCHOB, ARNE, GRATZKE, ALEXANDER, MOFFAT, BRYCE, ANTON, BITTNER, BORIS
Year of Publication 04.04.2013
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Year of Publication 04.04.2013
Patent
Projection objective of a microlithographic projection exposure apparatus
HODENBERG, MARTIN VON, RUDOLPH, GUENTER, SCHNEIDER, SONJA, WABRA, NORBERT, ZELLNER, JOHANNES, SCHNEIDER, RICARDA, SCHOB, ARNE, GRATZKE, ALEXANDER, MOFFAT, BRYCE ANTON, BITTNER, BORIS
Year of Publication 16.07.2013
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Year of Publication 16.07.2013
Patent