Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
PRUME, Klaus, MURALT, Paul, CALAME, Florian, SCHMITZ-KEMPEN, Thorsten, TIEDKE, Stephan
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Infrared-laser based characterization of the pyroelectricity in AlScN thin-films
Bette, Sebastian, Fichtner, Simon, Bröker, Sebastian, Nielen, Lutz, Schmitz-Kempen, Thorsten, Wagner, Bernhard, Van Buggenhout, Carl, Tiedke, Stephan, Tappertzhofen, Stefan
Published in Thin solid films (31.12.2019)
Published in Thin solid films (31.12.2019)
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Journal Article
New piezoelectric polymer characterization tool enabling the development of highly reliable and homogeneous materials for ductile sensor applications
Kremers, Tom, Cain, Markys G, Mardilovich, Peter, Schmitz-Kempen, Thorsten
Published in 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF) (23.07.2023)
Published in 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF) (23.07.2023)
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Conference Proceeding
A physical method for investigating defect chemistry in solid metal oxides
Rodenbücher, Christian, Korte, Carsten, Schmitz-Kempen, Thorsten, Bette, Sebastian, Szot, Kristof
Published in APL materials (01.01.2021)
Published in APL materials (01.01.2021)
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Journal Article
Surface mapping of field-induced piezoelectric strain at elevated temperature employing full-field interferometry
Stevenson, Tim, Quast, Tatjana, Bartl, Guido, Schmitz-Kempen, Thorsten, Weaver, Paul M.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.2015)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.2015)
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Journal Article
Comparable measurements and modeling of piezoelectric thin films for MEMS application
Schmitz-Kempen, Thorsten, Tiedke, Stephan, Mardilovich, Peter, Sivaramakrishnan, Subramanian, Lisec, Thomas, Stoppel, Fabian, Trolier-McKinstry, Susan, Muralt, Paul
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
Published in 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) (01.07.2013)
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Conference Proceeding
A physical method for investigating defect chemistry in solid metal oxides
Rodenbücher, Christian, Korte, Carsten, Schmitz-Kempen, Thorsten, Sebastian, Bette, Szot, Kristof
Published in arXiv.org (13.11.2020)
Published in arXiv.org (13.11.2020)
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Paper
Journal Article
Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level
Mertin, Stefan, Nyffeler, Clemens, Makkonen, Tapani, Heinz, Bernd, Mazzalai, Andrea, Schmitz-Kempen, Thorsten, Tiedke, Stephan, Pensala, Tuomas, Muralt, Paul
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films
Mertin, Stefan, Heinz, Bernd, Mazzalar, Andrea, Schmitz-Kempen, Thorsten, Tiedke, Stephan, Pensala, Tuomas
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
METHOD OF DETERMINING BEAM PARAMETERS OF A CHARGE CARRIER BEAM, MEASURING DEVICE, AND CHARGE CARRIER BEAM DEVICE WITH SUCH MEASURING DEVICE
REISGEN, UWE, SCHMITZ-KEMPEN, THORSTEN, BAUER, HANS-PETER, DE VRIES, JENS, REICHENBERG, BERND, BACKHAUS, ALEXANDER, UFER, SEBASTIAN
Year of Publication 04.05.2016
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Year of Publication 04.05.2016
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