Search Results - "SCHLEMM, HERMANN" :: K.UTB vyhledávací portál

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고주파수 전압을 공급하기 위한 내부 전기 네트워크를 갖는 전자 유닛 및 플라즈마 처리 시스템을 위한 캐리어 어레인지먼트

by ANSORGE ERIK, KEHR MIRKO, SCHLEMM HERMANN
Year of Publication 08.10.2019

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Patent

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MICROWAVE PLASMA GENERATING DEVICE AND METHOD FOR OPERATING SAME

by MAI JOACHIM, SCHLEMM HERMANN
Year of Publication 23.12.2014

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Patent

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기판을 이송하기 위한 장치, 그러한 장치의 기판 캐리어에 적합화된 수용 플레이트를 갖는 처리 장치, 기판을 이송하기 위한 그러한 장치를 사용하여 기판을 프로세싱하는 방법, 및 처리 시스템

by ANSORGE ERIK, RASCHKE SEBASTIAN, KEHR MIRKO, SCHLEMM HERMANN
Year of Publication 19.02.2020

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Patent

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

by UHLIG MATTHIAS, SCHLEMM HERMANN
Year of Publication 26.12.2011

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Patent

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DEVICE FOR PROCESSING PLASMA WITH A CIRCULATION OF PROCESS GAS IN MULTIPLE PLASMAS

by DECKER DANIEL, ANSORGE ERIK, KEHR MIRKO, SCHLEMM HERMANN
Year of Publication 14.11.2016

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Patent

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Effektives handbetriebenes zusätzliches Antriebssystem für muskelbetriebene Fahrzeuge

by Schlemm, Hermann
Year of Publication 20.07.2023

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Patent

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Linear radio frequency plasma sources for large scale industrial applications in photovoltaics

by Schlemm, H., Fritzsche, M., Roth, D.
Published in Surface & coatings technology (01.10.2005)

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Journal Article Conference Proceeding

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INLINE COATING INSTALLATION

by GROSSE THOMAS, DECKER DANIEL, GRIMM MICHAEL, MAI JOACHIM, SCHLEMM HERMANN
Year of Publication 20.09.2012

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Patent

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DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF A DEVICE OF THIS KIND, AND METHOD FOR PROCESSING A SUBSTRATE USING A DEVICE OF THIS KIND FOR THE TRANSPORT OF A SUBSTRATE, AND TREATMENT FACILITY

by SCHLEMM, Hermann, KEHR, Mirko, ANSORGE, Erik, RASCHKE, Sebastian
Year of Publication 29.08.2024

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Patent

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METHOD FOR DEPOSITING MULTI-LAYERED LAYERS AND/OR GRADIENT LAYERS

by GROSSE THOMAS, DECKER DANIEL, GRIMM MICHAEL, MAI JOACHIM, SCHLEMM HERMANN, SPERLICH HANS PETER
Year of Publication 13.09.2012

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Patent

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Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility

by Kehr, Mirko, Raschke, Sebastian, Ansorge, Erik, Schlemm, Hermann
Year of Publication 11.06.2024

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Patent

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MICROWAVE PLASMA GENERATING DEVICE AND METHOD FOR OPERATING THE SAME

by SCHLEMM, Hermann, MAI, Joachim
Year of Publication 05.06.2019

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Patent

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MICROWAVE PLASMA GENERATING DEVICE AND METHOD FOR OPERATING SAME

by MAI, JOACHIM, SCHLEMM, HERMANN
Year of Publication 28.08.2018

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Patent

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ELECTRODE UNIT WITH AN INTERNAL ELECTRIC NETWORK FOR FEEDING HIGH FREQUENCY VOLTAGE AND CARRIER ASSEMBLY FOR A PLASMA PROCESSING SYSTEM

by Kehr, Mirko, Ansorge, Erik, Schlemm, Hermann
Year of Publication 28.04.2020

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Patent

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DEVICE FOR TRANSPORT OF A SUBSTRATE, TREATMENT DEVICE WITH A HOLDER PLATE ADAPTED TO A SUBSTRATE HOLDER OF SUCH A DEVICE AND A METHOD FOR PROCESSING A SUBSTRATE USING SUCH A DEVICE FOR TRANSPORTING A SUBSTRATE AND TREATMENT PLANT

by KEHR, MIRKO, ANSORGE, ERIK, RASCHKE, SEBASTIAN, SCHLEMM, HERMANN
Year of Publication 13.12.2021

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DEVICE FOR TRANSPORT OF A SUBSTRATE, TREATMENT DEVICE WITH A HOLDER PLATE ADAPTED TO A SUBSTRATE HOLDER OF SUCH A DEVICE AND A METHOD FOR PROCESSING A SUBSTRATE USING SUCH A DEVICE FOR TRANSPORTING A SUBSTRATE AND TREATMENT PLANT

by Kehr, Mirko, Ansorge, Erik, Schlemm, Hermann, RASCHKE, Sebastian
Year of Publication 29.11.2021

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Patent

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Microwave plasma generating device and method for operating same

by Schlemm Hermann, Mai Joachim
Year of Publication 30.08.2016

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Patent

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ELECTRODE UNIT HAVING AN INTERNAL ELECTRICAL NETWORK FOR SUPPLYING HIGH-FREQUENCY VOLTAGE, AND CARRIER ARRANGEMENT FOR A PLASMA TREATMENT SYSTEM

by SCHLEMM, Hermann, KEHR, Mirko, ANSORGE, Erik
Year of Publication 02.01.2020

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Patent

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DEVICE FOR TRANSPORT OF A SUBSTRATE, TREATMENT DEVICE WITH A HOLDER PLATE ADAPTED TO A SUBSTRATE HOLDER OF SUCH A DEVICE AND A METHOD FOR PROCESSING A SUBSTRATE USING SUCH A DEVICE FOR TRANSPORTING A SUBSTRATE AND TREATMENT PLANT

by Kehr, Mirko, Raschke, Sebastian, Ansorge, Erik, Schlemm, Hermann
Year of Publication 10.09.2021

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DEVICE FOR TRANSPORT OF A SUBSTRATE, TREATMENT DEVICE WITH A HOLDER PLATE ADAPTED TO A SUBSTRATE HOLDER OF SUCH A DEVICE AND A METHOD FOR PROCESSING A SUBSTRATE USING SUCH A DEVICE FOR TRANSPORTING A SUBSTRATE AND TREATMENT PLANT

by Kehr, Mirko, Raschke, Sebastian, Ansorge, Erik, Schlemm, Hermann
Year of Publication 04.08.2021

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Patent

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