Linear radio frequency plasma sources for large scale industrial applications in photovoltaics
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Conference Proceeding
Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources
Schlemm, H., Mai, A., Roth, S., Roth, D., Baumgärtner, K.-M., Muegge, H.
Published in Surface & coatings technology (01.09.2003)
Published in Surface & coatings technology (01.09.2003)
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Journal Article
Mass-separated broad beam ion implantation of 25 keV N + in titanium
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Journal Article
Conference Proceeding
Laser desorption on Si surfaces by use of multiple excimer laser pulses
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Journal Article
Conference Proceeding
Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources
SCHLEMM, H, MAI, A, ROTH, S, ROTH, D, BAUMGÄRTNER, K.-M, MUEGGE, H
Published in Surface & coatings technology (2003)
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Published in Surface & coatings technology (2003)
Conference Proceeding
Compact broad beam ion implantation of 25 keV N/sup +/ in silicon
Schlemm, H.
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
Published in Proceedings of 11th International Conference on Ion Implantation Technology (1996)
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Conference Proceeding
On combining surface and bulk passivation of SiN/sub x/:H layers for mc-Si solar cells
Soppe, W.J., Hong, J., Kessels, W.M.M., van de Sanden, M.C.M., Arnoldbik, W.M., Schlemm, H., Devilee, C., Rieffe, H., Schiermeier, S.E.A., Bultman, J.H., Weeber, A.W.
Published in Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002 (2002)
Published in Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002 (2002)
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Conference Proceeding
On combining surface and bulk passivation of SiNx:H layers for mc-Si solar cells
SOPPE, W. J, HONG, J, WEEBER, A. W, KESSELS, W. M. M, VAN DE SANDEN, M. C. M, AMOLDBIK, W. M, SCHLEMM, H, DEVILEE, C, RIEFEE, H, SCHIERMEIER, S. E. A, BULTMAN, J. H
Published in sans titre (2002)
Published in sans titre (2002)
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Conference Proceeding