Split sputter mode: a novel sputtering method for flat-panel display manufacturing
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Published in Journal of Information Display (01.06.2011)
Published in Journal of Information Display (01.06.2011)
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Multi-oxide active layer deposition using Applied Materials Pivot array coater for high-mobility metal oxide TFT
Park, Hyun Chan, Scheer, Evelyn, Witting, Karin, Hanika, Markus, Bender, Marcus, Hsu, Hao Chien, Yim, Dong Kil
Published in Applied physics. A, Materials science & processing (01.11.2015)
Published in Applied physics. A, Materials science & processing (01.11.2015)
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Journal Article
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
Patent
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 14.09.2018
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Year of Publication 14.09.2018
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METHOD FOR COATING A SUBSTRATE AND COATER
BENDER MARCUS, PIERALISI FABIO, HANIKA MARKUS, SCHEER EVELYN, MAHNKE GUIDO
Year of Publication 13.05.2015
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Year of Publication 13.05.2015
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PVD EDGE UNIFORMITY IMPROVEMENT IN PVD ARRAY COATERS
GAERTNER HARALD, SEVERIN DANIEL, BENDER MARCUS, PIERALISI FABIO, SCHEER EVELYN, LINDENBERG RALPH
Year of Publication 20.12.2016
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Year of Publication 20.12.2016
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METHOD FOR COATING A SUBSTRATE AND COATER
LOPP ANDREAS, LIU JIAN, KLOEPPEL ANDREAS, SCHWANITZ KONRAD, PIERALISI FABIO, SCHEER EVELYN, HANIKA MARKUS
Year of Publication 05.03.2015
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Year of Publication 05.03.2015
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METHOD FOR COATING A SUBSTRATE AND COATER
BENDER MARCUS, PIERALISI FABIO, HANIKA MARKUS, SCHEER EVELYN, MAHNKE GUIDO
Year of Publication 21.08.2012
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Year of Publication 21.08.2012
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MULTIDIRECTIONAL RACETRACK ROTARY CATHODE FOR PVD ARRAY APPLICATIONS
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, SCHWANITZ KONRAD, PIERALISI FABIO, SCHEER EVELYN, HANIKA MARKUS, LINDENBERG RALPH
Year of Publication 19.06.2014
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Year of Publication 19.06.2014
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ADJUSTABLE MASK
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, SCHWANITZ KONRAD, PIERALISI FABIO, SCHEER EVELYN, HANIKA MARKUS, LINDENBERG RALPH
Year of Publication 15.05.2014
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Year of Publication 15.05.2014
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SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 20.03.2015
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Year of Publication 20.03.2015
Patent
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
LOPP ANDREAS, BENDER MARCUS, LIU JIAN, PIERALISI FABIO, SCHWANITZ KONRAD, HANIKA MARKUS, SCHEER EVELYN, LINDENBERG RALPH, MAHNKE GUIDO
Year of Publication 10.09.2013
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Year of Publication 10.09.2013
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METHOD OF OPERATING AN EVAPORATION SOURCE, EVAPORATION SYSTEM, AND SHIELD HANDLING APPARATUS
KHAMEHGIR, Pejman, HOFMANN, Annabelle, KREBS, Matthias, SCHEER, Evelyn
Year of Publication 25.03.2021
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Year of Publication 25.03.2021
Patent