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Year of Publication 01.08.2015
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Method for coating a substrate and coater
SCHEER, EVELYN, HANIKA, MARKUS, PIERALISI, FABIO, MAHNKE, GUIDO, BENDER, MARCUS
Year of Publication 01.08.2015
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Year of Publication 01.08.2015
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Systems and methods for forming a layer of sputtered material
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Year of Publication 01.07.2015
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SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
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Year of Publication 05.04.2012
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Edge uniformity improvement in pvd array coaters
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Year of Publication 23.11.2016
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Cathode assembly for a sputter deposition apparatus and method for depositing a film on a substrate in a sputter deposition apparatus
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Year of Publication 11.11.2016
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Year of Publication 11.11.2016
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Apparatus and method for deposition of material on a substrate
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Year of Publication 01.02.2016
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Method of fabricating a thin film transistor
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Year of Publication 01.03.2015
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Year of Publication 01.03.2015
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Method for coating a substrate and coater
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Year of Publication 04.07.2012
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Year of Publication 04.07.2012
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Systems and methods for forming a layer of sputtered material
SCHEER, EVELYN, HANIKA, MARKUS, PIERALISI, FABIO, MAHNKE, GUIDO, BENDER, MARCUS
Year of Publication 01.04.2012
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Year of Publication 01.04.2012
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Adjustable mask
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Year of Publication 25.06.2014
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Year of Publication 25.06.2014
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Apparatus for coating a layer of sputtered material on a substrate and deposition system
SCHWANITZ, KONRAD, KLOEPPEL, ANDREAS, SCHEER, EVELYN, HANIKA, MARKUS, PIERALISI, FABIO, LIU, JIAN
Year of Publication 01.03.2014
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Year of Publication 01.03.2014
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Method for coating a substrate and coater
SCHWANITZ, KONRAD, KLOEPPEL, ANDREAS, SCHEER, EVELYN, HANIKA, MARKUS, PIERALISI, FABIO, LOPP, ANDREAS, LIU, JIAN
Year of Publication 01.02.2014
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Year of Publication 01.02.2014
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Multidirectional racetrack rotary cathode for pvd array applications
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Year of Publication 18.09.2013
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Year of Publication 18.09.2013
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Method for coating a substrate and coater
SCHEER, EVELYN, HANIKA, MARKUS, PIERALISI, FABIO, MAHNKE, GUIDO, BENDER, MARCUS
Year of Publication 16.04.2011
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Year of Publication 16.04.2011
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