EXTREME ULTRAVIOLET LIGHT SOURCE
ARCHAND JASON M, PURVIS MICHAEL A, STEWART JOHN TOM. IV, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 05.01.2023
Get full text
Year of Publication 05.01.2023
Patent
EXTREME ULTRAVIOLET LIGHT SOURCE
ARCHAND JASON M, PURVIS MICHAEL A, STEWART JOHN TOM. IV, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 17.03.2017
Get full text
Year of Publication 17.03.2017
Patent
METHOD OF TIMING LASER BEAM PULSES TO REGULATE EXTREME ULTRAVIOLET LIGHT DOSING
GRAHAM MATTHEW R, CHANG STEVEN, SCHAFGANS ALEXANDER A, DUNSTAN WAYNE J, FRIHAUF PAUL A, LIU ANDREW, CROUCH JAMES H, JACQUES ROBERT N
Year of Publication 15.09.2015
Get full text
Year of Publication 15.09.2015
Patent
Extreme ultraviolet light source
Stewart, IV, John Tom, Schafgans, Alexander A, LaForge, Andrew, Arcand, Jason M, Tao, Yezheng, Jur, Jordan, Brown, Daniel
Year of Publication 28.08.2018
Get full text
Year of Publication 28.08.2018
Patent
Extreme ultraviolet light source
PURVIS MICHAEL A, STEWART, IV JOHN TOM, JUR JORDAN, ARCAND JASON M, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 31.05.2016
Get full text
Year of Publication 31.05.2016
Patent
EXTREME ULTRAVIOLET LIGHT SOURCE
STEWART, JOHN, TOM., IV, JUR, JORDAN, TAO, YEZHENG, PURVIS, MICHAEL, A, BROWN, DANIEL, SCHAFGANS, ALEXANDER, A, LAFORGE, ANDREW, ARCHAND, JASON, M
Year of Publication 10.03.2016
Get full text
Year of Publication 10.03.2016
Patent
EXTREME ULTRAVIOLET LIGHT SOURCE
STEWART, JOHN, TOM., IV, JUR, JORDAN, TAO, YEZHENG, PURVIS, MICHAEL, A, BROWN, DANIEL, SCHAFGANS, ALEXANDER, A, LAFORGE, ANDREW, ARCHAND, JASON, M
Year of Publication 14.01.2016
Get full text
Year of Publication 14.01.2016
Patent
EXTREME ULTRAVIOLET LIGHT SOURCE
PURVIS MICHAEL A, STEWART, IV JOHN TOM, JUR JORDAN, ARCAND JASON M, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 07.01.2016
Get full text
Year of Publication 07.01.2016
Patent
Method for generating extreme ultraviolet (EUV) light and EUV system
PURVIS, MICHAEL A, JUR, JORDAN, TAO, YEZHENG, ARCAND, JASON M, BROWN, DANIEL, SCHAFGANS, ALEXANDER A, STEWART IV, JOHN TOM, LAFORGE, ANDREW
Year of Publication 01.02.2021
Get full text
Year of Publication 01.02.2021
Patent
Method for generating extreme ultraviolet (euv) light and euv system
PURVIS, MICHAEL A, JUR, JORDAN, TAO, YEZHENG, ARCAND, JASON M, BROWN, DANIEL, SCHAFGANS, ALEXANDER A, STEWART IV, JOHN TOM, LAFORGE, ANDREW
Year of Publication 21.09.2020
Get full text
Year of Publication 21.09.2020
Patent
Extreme ultraviolet light source
ARCHAND JASON M, PURVIS MICHAEL A, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, STEWART JOHN TOM IV, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 11.02.2020
Get full text
Year of Publication 11.02.2020
Patent
Extreme ultraviolet light source
ARCHAND JASON M, PURVIS MICHAEL A, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, STEWART JOHN TOM IV, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 22.03.2017
Get full text
Year of Publication 22.03.2017
Patent
Extreme ultraviolet light source
PURVIS, MICHAEL A, JUR, JORDAN, TAO, YEZHENG, ARCAND, JASON M, BROWN, DANIEL, SCHAFGANS, ALEXANDER A, STEWART IV, JOHN TOM, LAFORGE, ANDREW
Year of Publication 16.01.2016
Get full text
Year of Publication 16.01.2016
Patent