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Year of Publication 20.08.2002
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Diffusion preventing barrier layer in integrated circuit inter-metal layer dielectrics
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Year of Publication 01.09.2001
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Year of Publication 31.08.2001
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Year of Publication 31.08.2001
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Diffusion preventing barrier layer in integrated circuit inter-metal layer dielectrics
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Year of Publication 29.08.2001
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Year of Publication 29.08.2001
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