2022 Review of Data-Driven Plasma Science
Anirudh, Rushil, Archibald, Rick, Asif, M. Salman, Becker, Markus M., Benkadda, Sadruddin, Bremer, Peer-Timo, Bude, Rick H. S., Chang, C. S., Chen, Lei, Churchill, R. M., Citrin, Jonathan, Gaffney, Jim A., Gainaru, Ana, Gekelman, Walter, Gibbs, Tom, Hamaguchi, Satoshi, Hill, Christian, Humbird, Kelli, Jalas, Soren, Kawaguchi, Satoru, Kim, Gon-Ho, Kirchen, Manuel, Klasky, Scott, Kline, John L., Krushelnick, Karl, Kustowski, Bogdan, Lapenta, Giovanni, Li, Wenting, Ma, Tammy, Mason, Nigel J., Mesbah, Ali, Michoski, Craig, Munson, Todd, Murakami, Izumi, Najm, Habib N., Olofsson, K. Erik J., Park, Seolhye, Peterson, J. Luc, Probst, Michael, Pugmire, David, Sammuli, Brian, Sawlani, Kapil, Scheinker, Alexander, Schissel, David P., Shalloo, Rob J., Shinagawa, Jun, Seong, Jaegu, Spears, Brian K., Tennyson, Jonathan, Thiagarajan, Jayaraman, Ticos, Catalin M., Trieschmann, Jan, Dijk, Jan van, Essen, Brian Van, Ventzek, Peter, Wang, Haimin, Wang, Jason T. L., Wang, Zhehui, Wende, Kristian, Xu, Xueqiao, Yamada, Hiroshi, Yokoyama, Tatsuya, Zhang, Xinhua
Published in IEEE transactions on plasma science (01.07.2023)
Published in IEEE transactions on plasma science (01.07.2023)
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Journal Article
디바이스 제조 툴들의 분석을 위한 열적 이미징 (THERMAL IMAGING)
SAWLANI KAPIL, SAKIYAMA YUKINORI, HASKELL BENJAMIN ALLEN, FRANZEN PAUL, LEESER KARL FREDERICK, DANEK MICHAL, REDDY KAPU SIRISH
Year of Publication 24.06.2024
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Year of Publication 24.06.2024
Patent
반도체 제작 장비를 위한 예측 유지 보수
ROHAM SASSAN, JIN XIAOQIANG, GUO JIAN, SAWLANI KAPIL, SOLOMON NATAN, WILLIAMS BRIAN JOSEPH, DANEK MICHAL
Year of Publication 10.07.2023
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Year of Publication 10.07.2023
Patent
반도체 제작을 위한 레시피의 결정 (determination)
BASU ATASHI, FRIED DAVID MICHAEL, DANEK MICHAL, ALDEN EMILY ANN, SAWLANI KAPIL UMESH
Year of Publication 20.06.2022
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Year of Publication 20.06.2022
Patent
플라즈마 조건들의 이미지 분석
SAWLANI KAPIL, BADT DAVID, SAKIYAMA YUKINORI, HASKELL BENJAMIN ALLEN, FRANZEN PAUL, LEESER KARL FREDERICK, WILLIAMS BRIAN JOSEPH, DANEK MICHAL, PETRAGLIA JENNIFER LEIGH, REDDY KAPU SIRISH
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
Patent
반도체 장비에 대한 결함 분류 및 소스 분석
GOTTSCHO RICHARD A, SAWLANI KAPIL, HANSEN KEITH, WELLS KEITH, DANEK MICHAL
Year of Publication 20.08.2021
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Year of Publication 20.08.2021
Patent
반도체-제작 프로세스들을 위한 성능 예측기들
GOPINATH SANJAY, ROHAM SASSAN, BROGAN LEE J, SRIRAMAN SARAVANAPRIYAN, HASKELL BENJAMIN ALLEN, COHEN DAVID G, DANEK MICHAL, VELLANKI RAVI, SAWLANI KAPIL UMESH
Year of Publication 04.10.2022
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Year of Publication 04.10.2022
Patent
피처 스케일 모델링을 사용한 충진 프로세스 최적화
CHANDRASHEKAR ANAND, FRIED DAVID M, SAWLANI KAPIL, LI DONGYAO, BOWES MICHAEL, BASU ATASHI, DANEK MICHAL
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
Patent
IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING COMPUTER VISION SYSTEMS
RUMER MICHAEL, LIND GARY B, SAWLANI KAPIL, ASHTIANI KAIHAN, POWELL RONALD, DANEK MICHAL
Year of Publication 30.04.2019
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Year of Publication 30.04.2019
Patent
PROCESSING TOOL WITH HYPERSPECTRAL CAMERA FOR METROLOGY-BASED ANALYSIS
FRANZEN, Paul, PORTER, David, SAWLANI, Kapil, CHRISTENSEN, Michael, MARTIN, Patging John Elsworth
Year of Publication 13.06.2024
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Year of Publication 13.06.2024
Patent
DETERMINATION OF RECIPES FOR MANUFACTURING SEMICONDUCTOR DEVICES
Alden, Emily Ann, Sawlani, Kapil Umesh, Danek, Michal, Basu, Atashi, Fried, David Michael
Year of Publication 21.03.2024
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Year of Publication 21.03.2024
Patent
MULTI-SENSOR DETERMINATION OF A STATE OF SEMICONDUCTOR EQUIPMENT
FRANZEN, Paul, SAWLANI, Kapil, VASQUEZ, Miguel Benjamin, KONKOLA, Paul, YEE, Benjamin Tong, VALLEY, John
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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PREDICTIVE MAINTENANCE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Guo, Jian, Danek, Michal, Solomon, Natan, Jin, Xiaoqiang, Williams, Brian Joseph, Sawlani, Kapil, Roham, Sassan
Year of Publication 14.12.2023
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Year of Publication 14.12.2023
Patent