페이스팅 프로세스 동안 보호 디스크로 기판 홀더 교체
BREZOCZKY THOMAS, SATYAVOLU NITIN BHARADWAJ, YEDLA SRINIVASA RAO, PRASAD BHASKAR, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 17.04.2023
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Year of Publication 17.04.2023
Patent
가열 및 척킹 능력들을 갖는 정전 척
SHIRAHATTI LAKSHMIKANTH KRISHNAMURTHY, RAJENDRAN HARI PRASATH, SATYAVOLU NITIN BHARADWAJ, BREZOCZKY THOMAS, YEDLA SRINIVASA RAO, PRASAD BHASKAR, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 11.04.2023
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Year of Publication 11.04.2023
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고온 및 진공 격리 프로세싱 미니 환경들
SHIRAHATTI LAKSHMIKANTH KRISHNAMURTHY, RAJENDRAN HARI PRASATH, MILLER KEITH A, SATYAVOLU NITIN BHARADWAJ, BREZOCZKY THOMAS, YEDLA SRINIVASA RAO, SAVANDAIAH KIRANKUMAR NEELASANDRA
Year of Publication 03.02.2023
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Year of Publication 03.02.2023
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METHODOLOGY FOR SUBSTRATE TO CATHODE PLANARITY AND CENTERING ALIGNMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
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Pedestal assembly for a substrate processing chamber
Prasad, Bhaskar, Satyavolu, Nitin Bharadwaj, Savandaiah, Kirankumar Neelasandra, Yedla, Srinivasa Rao, Brezoczky, Thomas
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
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APPARATUS FOR CONTROLLING LIFT PIN MOVEMENT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra, SRIVASTAVA, Anubhav
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
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REDUCED SUBSTRATE PROCESS CHAMBER CAVITY VOLUME
BREZOCZKY, Thomas, YEDLA, Srinivasa Rao, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 14.07.2022
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Year of Publication 14.07.2022
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Electrostatic chuck having a heating and chucking capabilities
Shirahatti, Lakshmikanth Krishnamurthy, Prasad, Bhaskar, Satyavolu, Nitin Bharadwaj, Savandaiah, Kirankumar Neelasandra, Yedla, Srinivasa Rao, Rajendran, Hari Prasath, Brezoczky, Thomas
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
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ALIGNMENT OF AN ELECTROSTATIC CHUCK WITH A SUBSTRATE SUPPORT
BREZOCZKY, Thomas, PRASAD, Bhaskar, SATYAVOLU, Nitin Bharadwaj, YEDLA, Srinivasa Rao, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
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PEDESTAL ASSEMBLY FOR A SUBSTRATE PROCESSING CHAMBER
BREZOCZKY, Thomas, PRASAD, Bhaskar, YEDLA, Srinivasa Rao, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
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TRANSFER CAROUSEL WITH DETACHABLE CHUCKS
BREZOCZKY, Thomas, PRASAD, Bhaskar, YEDLA, Srinivasa Rao, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra
Year of Publication 13.01.2022
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Year of Publication 13.01.2022
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