ARC DISCHARGE GENERATOR
SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
Year of Publication 08.02.2018
Get full text
Year of Publication 08.02.2018
Patent
HIGH FREQUENCY SUPPLY STRUCTURE
SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
Year of Publication 01.02.2018
Get full text
Year of Publication 01.02.2018
Patent
CARBON FILM REMOVING METHOD FOR AND FILM REMOVAL ANODE
SATO TAKAYASU, NAKADA HIROMICHI, YAZA SOICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
Year of Publication 19.05.2016
Get full text
Year of Publication 19.05.2016
Patent
FILM DEPOSITION APPARATUS
MATSUDA SHOTA, SATO TAKAYASU, TSUBOI HIROKI, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA
Year of Publication 15.02.2018
Get full text
Year of Publication 15.02.2018
Patent
FILM DEPOSITION METHOD, AND PLASMA CHEMICAL VAPOR PHASE GROWTH APPARATUS
MANABE KAZUMIKI, SATO TAKAYASU, NAKADA HIROMICHI, SATOU YOUJI, TACHIBANA KAZUTAKA, OKAMURA SEIJI, YAMAMOTO IZURU
Year of Publication 07.09.2017
Get full text
Year of Publication 07.09.2017
Patent
PLASMA CHEMICAL VAPOR DEPOSITION APPARATUS
TSURUMOTO RYO, SATO TAKAYASU, NAKADA HIROMICHI, TAKANO YUJI, ARIYADA OSAMU, SATOU YOUJI, TACHIBANA KAZUTAKA
Year of Publication 12.01.2017
Get full text
Year of Publication 12.01.2017
Patent