OPTICAL DISK DEVICE, CLEANING METHOD, AND PROGRAM
ASANO YUICHI, NAKAMURA TAKASHI, SHIMAMOTO NATSUKI, YOKOCHI YOSHIAKI, SATO YASUHISA
Year of Publication 03.12.2009
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Year of Publication 03.12.2009
Patent
AUTOMATIC REFERENCE POSITION TEACHING METHOD, AUTOMATIC POSITIONING METHOD, AND AUTOMATIC CARRYING METHOD FOR DISK-LIKE OBJECT, AUTOMATIC REFERENCE POSITION TEACHING DEVICE, AUTOMATIC POSITIONING DEVICE, AND AUTOMATIC CARRYING DEVICE FOR DISK-LIKE OBJECT USING THESE METHODS, AND AUTOMATIC SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Patent