Search Results - "SATO, TATSUYA E" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

by SATO TATSUYA E, NEWMAN ERAN
Year of Publication 09.11.2023

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Patent

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

by SATO TATSUYA E, NEWMAN ERAN
Year of Publication 01.08.2016

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Patent

금속 산화물 후처리를 위한 방법들

금속 산화물 후처리를 위한 방법들

by LIU WEI, SATO TATSUYA E, XIA LI QUN
Year of Publication 06.03.2020

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Patent

알루미늄 함유 막들을 이용한 갭충전

알루미늄 함유 막들을 이용한 갭충전

by KALUTARAGE LAKMAL C, ANTHIS JEFFREY W, SALY MARK, SATO TATSUYA E
Year of Publication 03.05.2021

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Patent

재료 구조들을 향상시키기 위한 처리들

재료 구조들을 향상시키기 위한 처리들

by CHU DAVID, LIU PATRICIA M, CHU CHARLES, CHEN SHIH CHUNG, SATO TATSUYA E, BEVAN MALCOLM J, SWENBERG JOHANES, HUNG STEVEN C
Year of Publication 09.12.2021

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Patent

N7/N5 FINFET 및 그 이상을 위한 공극 스페이서를 제조하는 방법

N7/N5 FINFET 및 그 이상을 위한 공극 스페이서를 제조하는 방법

by HUNG RAYMOND HOIMAN, KIM NAM SUNG, CHANG CHIH YANG, SATO TATSUYA E, SUN SHIYU, WOOD BINGXI SUN
Year of Publication 07.06.2019

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Patent

IN-SITU HYDROXYLATION SYSTEM

IN-SITU HYDROXYLATION SYSTEM

by CHOI KENRIC, ULLOA ERNESTO, SATO TATSUYA E
Year of Publication 29.04.2014

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Patent

IMPROVED INJECTOR FOR SPATIALLY SEPARATED ATOMIC LAYER DEPOSITION CHAMBER

IMPROVED INJECTOR FOR SPATIALLY SEPARATED ATOMIC LAYER DEPOSITION CHAMBER

by GRIFFIN KEVIN, TOBIN JEFF, LIU PATRICIA M, YUDOVSKY JOSEPH, MILLER AARON, SATO TATSUYA E, NEWMAN ERAN
Year of Publication 01.08.2016

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Patent

IN SITU VAPOR PHASE SURFACE ACTIVATION OF SIO2

IN SITU VAPOR PHASE SURFACE ACTIVATION OF SIO2

by ANTHIS JEFFREY W, LIU PATRICIA M, VERHAVERBEKE STEVEN, SATO TATSUYA E, ZUBKOV VLADIMIR, THOMPSON DAVID, MAHAJANI MAITREYEE, GOUK ROMAN, BEVAN MALCOLM J
Year of Publication 29.04.2014

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Patent

Apparatus and methods for depositing ALD films with enhanced chemical exchange

Apparatus and methods for depositing ALD films with enhanced chemical exchange

by Sato, Tatsuya E
Year of Publication 25.05.2021

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Patent

THERMAL ALD OF METAL OXIDE USING ISSG

THERMAL ALD OF METAL OXIDE USING ISSG

by SATO, Tatsuya E
Year of Publication 14.01.2021

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Patent

THERMAL ALD OF METAL OXIDE USING ISSG

THERMAL ALD OF METAL OXIDE USING ISSG

by Sato, Tatsuya E
Year of Publication 07.01.2021

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Patent

METHODS OF ATOMIC LAYER DEPOSITION

METHODS OF ATOMIC LAYER DEPOSITION

by Chaney, Kendrick H, Sato, Tatsuya E
Year of Publication 17.03.2022

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Patent

Apparatus And Methods For Depositing ALD Films With Enhanced Chemical Exchange

Apparatus And Methods For Depositing ALD Films With Enhanced Chemical Exchange

by Sato Tatsuya E
Year of Publication 09.11.2017

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Patent

Gap-fill with aluminum-containing films

Gap-fill with aluminum-containing films

by Anthis, Jeffrey W, Saly, Mark, Kalutarage, Lakmal C, Sato, Tatsuya E
Year of Publication 25.06.2024

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Patent

Amorphous silicon doped yttrium oxide films and methods of formation

Amorphous silicon doped yttrium oxide films and methods of formation

by Xia, Li-Qun, Seutter, Sean M, Sato, Tatsuya E
Year of Publication 28.06.2022

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Patent

Atomic layer deposition of films using spatially separated injector chamber

Atomic layer deposition of films using spatially separated injector chamber

by Newman Eran, Sato Tatsuya E
Year of Publication 04.07.2017

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Patent

Methods For Metal Oxide Post-Treatment

Methods For Metal Oxide Post-Treatment

by Xia, Li-Qun, Liu, Wei, Sato, Tatsuya E
Year of Publication 28.05.2020

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Patent

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

ATOMIC LAYER DEPOSITION OF FILMS USING SPATIALLY SEPARATED INJECTOR CHAMBER

by NEWMAN, ERAN, SATO, TATSUYA E
Year of Publication 28.07.2016

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Patent

Atomic Layer Deposition Of Films Using Spatially Separated Injector Chamber

Atomic Layer Deposition Of Films Using Spatially Separated Injector Chamber

by Newman Eran, Sato Tatsuya E
Year of Publication 28.07.2016

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Patent