Sample preparation technique for the revelation of a semiconductor dopant using an FE-SEM
Sunaoshi, Takeshi, Takeuchi, Shuichi, Kamino, Atsushi, Sasajima, Masahiro, Ito, Hiroyuki
Published in 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2016)
Published in 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2016)
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Conference Proceeding
하전 입자선 장치
NAKAMURA YOHEI, SASAJIMA MASAHIRO, AGEMURA TOSHIHIDE, TAKAGUCHI KATSURA, TSUNO NATSUKI
Year of Publication 16.06.2021
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Year of Publication 16.06.2021
Patent
CHARGED PARTICLE BEAM DEVICE
TAKAGUCHI Katsura, AGEMURA Toshihide, TSUNO Natsuki, NAKAMURA Yohei, SASAJIMA Masahiro
Year of Publication 11.06.2020
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Year of Publication 11.06.2020
Patent
High Spatial Resolution and Wide Range EDS Analysis with FE-SEM
Takeuchi, Shuichi, Hashimoto, Yoichiro, Sasajima, Masahiro, Hosoya, Kotaro, Dan, Yukari, Miyasaka, Shintaro, Yamaguchi, Susumu
Published in Microscopy and microanalysis (01.07.2017)
Published in Microscopy and microanalysis (01.07.2017)
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Journal Article
CHARGED-PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD USING SAME
TAKAGUCHI Katsura, TSUNO Natsuki, AGEMURA Toshihide, SASAJIMA Masahiro
Year of Publication 31.05.2019
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Year of Publication 31.05.2019
Patent
계측 장치 및 관측 조건의 설정 방법
NAKAMURA YOHEI, NAKAMURA MITSUHIRO, SASAJIMA MASAHIRO, AGEMURA TOSHIHIDE, ARAKI RYOKO, TSUNO NATSUKI
Year of Publication 17.07.2019
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Year of Publication 17.07.2019
Patent
MEASURING DEVICE AND METHOD FOR SETTING OBSERVATION CONDITIONS
NAKAMURA, Yohei, ARAKI, Ryoko, TSUNO, Natsuki, NAKAMURA, Mitsuhiro, SASAJIMA, Masahiro, AGEMURA, Toshihide
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
MEASUREMENT DEVICE AND SETTING METHOD OF OBSERVATION CONDITION
NAKAMURA YOHEI, NAKAMURA MITSUHIRO, SASAJIMA MASAHIRO, AGEMURA TOSHIHIDE, ARAKI RYOKO, TSUNO NATSUKI
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
CHARGED PARTICLE BEAM DEVICE
ITABASHI Hironori, SATOU Hirofumi, TSUNO Natsuki, NAKAMURA Yohei, SASAJIMA Masahiro, NAKAMURA Mitsuhiro, SAITO Tsutomu
Year of Publication 28.12.2017
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Year of Publication 28.12.2017
Patent
CHARGED PARTICLE BEAM DEVICE
KIMURA MASASHI, SASAJIMA MASAHIRO, TAKAHOKO YOSHIHIRO, KOBAYASHI DAISUKE
Year of Publication 13.11.2014
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Year of Publication 13.11.2014
Patent