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대칭형 반도체 프로세싱 챔버

대칭형 반도체 프로세싱 챔버

by SARODE YOGANANDA
Year of Publication 05.03.2024

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Patent

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

by CHANG XUE, SARODE YOGANANDA, RAMASWAMY KARTIK, NGUYEN ANDREW
Year of Publication 27.09.2024

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Patent

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

by CHANG XUE, SARODE YOGANANDA, RAMASWAMY KARTIK, NGUYEN ANDREW
Year of Publication 14.03.2023

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Patent

인-시튜 반도체 프로세싱 챔버 온도 장치

인-시튜 반도체 프로세싱 챔버 온도 장치

by CHANG XUE, SARODE YOGANANDA, RAMASWAMY KARTIK, NGUYEN ANDREW
Year of Publication 30.01.2020

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Patent

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

by SARODE, Yogananda
Year of Publication 23.05.2024

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Patent

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

by SARODE, Yogananda
Year of Publication 19.01.2023

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Patent

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER

by SARODE, Yogananda
Year of Publication 19.01.2023

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Patent

Symmetric semiconductor processing chamber

Symmetric semiconductor processing chamber

by SARODE, YOGANANDA
Year of Publication 16.01.2024

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Patent

SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING

SEMICONDUCTOR PROCESSING CHAMBER LID AND COATING

by Vishwanath, Yogananda Sarode, KUMAR, Anand, KIM, George
Year of Publication 17.10.2024

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Patent

DETECTOR FOR PROCESS KIT RING WEAR

DETECTOR FOR PROCESS KIT RING WEAR

by Vishwanath, Yogananda Sarode, Criminale, Phillip A
Year of Publication 06.06.2024

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Patent

Detector for process kit ring wear

Detector for process kit ring wear

by Vishwanath, Yogananda Sarode, Criminale, Phillip A
Year of Publication 27.02.2024

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Patent

SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY

SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY

by VISHWANATH, Yogananda Sarode
Year of Publication 23.07.2020

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Patent

DETECTOR FOR PROCESS KIT RING WEAR

DETECTOR FOR PROCESS KIT RING WEAR

by Vishwanath, Yogananda Sarode, Criminale, Phillip A
Year of Publication 17.12.2020

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Patent

DETECTOR FOR PROCESS KIT RING WEAR

DETECTOR FOR PROCESS KIT RING WEAR

by CRIMINALE, Phillip A, VISHWANATH, Yogananda Sarode
Year of Publication 17.12.2020

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Patent

Symmetric flow valve for flow conductance control

Symmetric flow valve for flow conductance control

by Narayan, Balachandra Jatak, Chang, Xue, Vishwanath, Yogananda Sarode, Nguyen, Andrew, Naik, Chetan, Rayaroth, Anilkumar
Year of Publication 05.12.2023

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Patent

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

IN-SITU SEMICONDUCTOR PROCESSING CHAMBER TEMPERATURE APPARATUS

by RAMASWAMY, Kartik, CHANG, Xue, NGUYEN, Andrew, SARODE, Yogananda
Year of Publication 10.03.2022

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Patent

Metal oxide preclean chamber with improved selectivity and flow conductance

Metal oxide preclean chamber with improved selectivity and flow conductance

by Sainath, Abilash, Forster, John C, Vishwanath, Yogananda Sarode, Chang, Xue Yang, Tang, Xianmin, Nguyen, Andrew, Gung, Tza-Jing, Lei, Yu
Year of Publication 24.09.2024

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Patent

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND METHOD

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS AND METHOD

by Chang, Xue, Vishwanath, Yogananda Sarode, Nguyen, Andrew
Year of Publication 07.11.2019

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Patent

IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS

IN SITU FAILURE DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS

by Vishwanath, Yogananda Sarode, Madananth, Srivatsa, Andrews, Jacob, Kumar, Dhananjai
Year of Publication 10.06.2021

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Patent

SYMMETRIC FLOW VALVE FOR FLOW CONDUCTANCE CONTROL

SYMMETRIC FLOW VALVE FOR FLOW CONDUCTANCE CONTROL

by RAYAROTH, Anilkumar, NAIK, Chetan, CHANG, Xue, NGUYEN, Andrew, NARAYAN, Balachandra Jatak, VISHWANATH, Yogananda Sarode
Year of Publication 24.03.2022

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Patent

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