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Method for predicting measurement deviation in semiconductor manufacturing process

Method for predicting measurement deviation in semiconductor manufacturing process

by SARAHIAN RAMESH, ISHIBASHI MASASHI, SAPTARA PUSHKAR, SANNO NORIAKI, DOS SANTOS GUZERA THERESA, BASTANI VAHID
Year of Publication 13.10.2023

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Patent

Subfield control of lithographic processes and associated apparatuses

Subfield control of lithographic processes and associated apparatuses

by SAPTARA PUSHKAR, DERWIN PAUL, SMOLBERG, PETER, G., J, EL BATY KARIM
Year of Publication 11.03.2022

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Patent