Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts
Insepov, Z., Allen, L.P., Santeufemio, C., Jones, K.S., Yamada, I.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2003)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2003)
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Journal Article
Substrate smoothing using gas cluster ion beam processing
ALLEN, L. P, FENNER, D. B, DIFILIPPO, V, SANTEUFEMIO, C, DEGENKOLB, E, BROOKS, W, MACK, M, HAUTALA, J
Published in Journal of electronic materials (01.07.2001)
Published in Journal of electronic materials (01.07.2001)
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Journal Article
Gas-cluster ion-beam smoothing of chemo-mechanical-polish processed GaSb(10.0) substrates
ALLEN, L. P, TETREAULT, T. G, SUNG, C, SANTEUFEMIO, C, LI, X, GOODHUE, W. D, BLISS, D, TABAT, M, JONES, K. S, DALLAS, G, BAKKEN, D
Published in Journal of electronic materials (01.08.2003)
Published in Journal of electronic materials (01.08.2003)
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Conference Proceeding
Journal Article
Nanocharacterization Of Gallium Antimonide Substrate Surface By Tem/Afm
Li, X., Allen, L., Santeufemio, C., Goodhue, W., Sung, C.
Published in Microscopy and microanalysis (01.08.2002)
Published in Microscopy and microanalysis (01.08.2002)
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Journal Article
SOI uniformity and surface smoothness improvement using GCIB processing
ALLEN, L. P, CALIENDO, S, HOFMEESTER, N, HARRINGTON, E, WALSH, M, TABAT, M, TETREAULT, T. G, DEGENKOB, E, SANTEUFEMIO, C
Published in 2002 IEEE International SOI Conference (2002)
Published in 2002 IEEE International SOI Conference (2002)
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Conference Proceeding
The Neuronal Growth-Associated Protein GAP-43 Interacts with Rabaptin-5 and Participates in Endocytosis
Neve, Rachael L, Coopersmith, Robert, McPhie, Donna L, Santeufemio, Christopher, Pratt, Kara G, Murphy, Curran J, Lynn, Stephanie D
Published in The Journal of neuroscience (01.10.1998)
Published in The Journal of neuroscience (01.10.1998)
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Journal Article
SGOI thinning and uniformity improvement using a fluoride GCIB process
Chu, Allen, Skinner, Hautala, Tetreault, MacCrimmon, Santeufemio, Degenkolb, Fenner
Published in 2003 IEEE International Conference on SOI (2003)
Published in 2003 IEEE International Conference on SOI (2003)
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Conference Proceeding
Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts
Insepov, Z., Toyoda, N., Yamada, I., Allen, L.P., Santeufemio, C.L.
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)
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Conference Proceeding