배치 웨이퍼 탈기 챔버, 및 팩토리 인터페이스 및 진공 기반 메인프레임으로의 통합
CHACIN JUAN, MERRY NIR, MAZZOCCO JOHN JOSEPH, RADKO MAREK, KOSHTI SUSHANT S, HRUZEK DEAN C, REUTER PAUL B, SANSONI STEVEN
Year of Publication 20.02.2023
Get full text
Year of Publication 20.02.2023
Patent
유기 오염 없는 표면 기계가공
MURAYAMA YUJI, HUDGENS JEFFREY C, RADKO MAREK W, MADIWAL NAGENDRA, SANSONI STEVEN VICTOR, GUO YUANHONG, GUO SHENG MICHAEL, BANSAL ANURAG, FARBER MATVEY, SUH SONG MOON, GOU PINGPING, CHEN SHAOFENG, KUCHAR MICHAEL
Year of Publication 12.01.2023
Get full text
Year of Publication 12.01.2023
Patent
챔버 내 히터 및 웨이퍼 회전 메커니즘을 위한 프로세스 키트 설계
TSAI CHENG HSIUNG, SANSONI STEVEN V, BANTHIA VIKASH, TAVASSOLI HAMID, MUSTAFA MUHANNAD, RASHEED MUHAMMAD M
Year of Publication 09.07.2019
Get full text
Year of Publication 09.07.2019
Patent
SUBSTRATE CARRIER HAVING HARD MASK
MORAES KEVIN, LERNER ALEXANDER, SHAVIV ROEY, KARAZIM MICHAEL, CONSTANT ANDREW, KUMAR NIRANJAN, BRODINE JEFFREY, SADE AMI, VELLORE KIM, SANSONI STEVEN
Year of Publication 17.07.2019
Get full text
Year of Publication 17.07.2019
Patent
LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME
MERRY NIR, SANSONI STEVEN V, CORNELIUS ANDREW S, HUDGENS JEFFREY C, PURI AMITABH, DECOTTIGNIES ROBERT IRWIN, IRWIN PETER, RICE MICHAEL R, SZUDARSKI STEVE, HRUZEK DEAN C, ENGLHARDT ERIC A
Year of Publication 16.02.2021
Get full text
Year of Publication 16.02.2021
Patent
SUBSTRATE TRANSFER ROBOT END EFFECTOR
GREENBERG DANIEL, MORI GLEN, SANSONI STEVEN V, SUH SONG MOON, BRODINE JEFFREY, AGARWAL PULKIT
Year of Publication 08.03.2017
Get full text
Year of Publication 08.03.2017
Patent
ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF
ROY SHAMBHU N, RIKER MARTIN LEE, SANSONI STEVEN V, MILLER KEITH A, PARKHE VIJAY D
Year of Publication 10.01.2014
Get full text
Year of Publication 10.01.2014
Patent
ELECTROSTATIC CHUCK ASSEMBLY
PONNEKANTI HARI K, ROY SHAMBHU N, TSAI CHENG HSIUNG, SANSONI STEVEN V, PARKHE VIJAY D, BROWN KARL M
Year of Publication 12.05.2011
Get full text
Year of Publication 12.05.2011
Patent
BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION
Sansoni, Steven V, Sriram, Mandyam, Fu, Jianming, Baluja, Sanjeev, Gung, Tza-Jing, Wang, Haitao, Gandikota, Srinivas
Year of Publication 23.05.2024
Get full text
Year of Publication 23.05.2024
Patent
Detachable biasable electrostatic chuck for high temperature applications
Sansoni, Steven V, Sundararajan, Mukund, Rao, Shreesha Yogish, Tsai, Cheng-Hsiung Matthew, Koppa, Manjunatha P
Year of Publication 30.01.2024
Get full text
Year of Publication 30.01.2024
Patent
BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION
SRIRAM, Mandyam, BALUJA, Sanjeev, GUNG, Tza-Jing, FU, Jianming, SANSONI, Steven V, WANG, Haitao, GANDIKOTA, Srinivas
Year of Publication 30.05.2024
Get full text
Year of Publication 30.05.2024
Patent