Design and fabrication of a large area freestanding compressive stress SiO 2 optical window
Van Toan, Nguyen, Sangu, Suguru, Ono, Takahito
Published in Journal of micromechanics and microengineering (01.07.2016)
Published in Journal of micromechanics and microengineering (01.07.2016)
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Journal Article
Glass reflow process for microsystem applications
Van Toan, Nguyen, Sangu, Suguru, Ono, Takahito
Published in Journal of micromechanics and microengineering (14.10.2016)
Published in Journal of micromechanics and microengineering (14.10.2016)
Get full text
Journal Article
Design and fabrication of a large area freestanding compressive stress SiO2 optical window
Van Toan, Nguyen, Sangu, Suguru, Ono, Takahito
Published in Journal of micromechanics and microengineering (21.06.2016)
Published in Journal of micromechanics and microengineering (21.06.2016)
Get full text
Journal Article