Epitaxial chamber with customizable flow injection
CARLSON, DAVID K, LAU, SHU-KWAN, SAMIR, MEHMET TUGRUL, LI, XUEBIN, SANCHEZ, ERROR ANTONIO C, CONG, ZHEPENG, YE, ZHIYUAN, SRINIVASAN, SWAMINATHAN
Year of Publication 01.07.2018
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Year of Publication 01.07.2018
Patent
Epitaxial chamber with customizable flow injection
CARLSON, DAVID K, LAU, SHU-KWAN, SAMIR, MEHMET TUGRUL, SANCHEZ, ERROR ANTONIO C, CONG, ZHEPENG, LI, XUE-BIN, SRINIVASAN, SWAMINATHAN, YE, ZHI-YUAN
Year of Publication 16.05.2014
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Year of Publication 16.05.2014
Patent