Thermal atomic layer deposition of rhenium nitride and rhenium metal thin films using methyltrioxorhenium
Cwik, Stefan, Woods, Keenan N, Perera, S. Sameera, Saly, Mark J, Knisley, Thomas J, Winter, Charles H
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
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Atomic Layer Deposition of Cobalt Silicide Thin Films Studied by in Situ Infrared Spectroscopy
Bernal-Ramos, Karla, Saly, Mark J, Kanjolia, Ravindra K, Chabal, Yves J
Published in Chemistry of materials (28.07.2015)
Published in Chemistry of materials (28.07.2015)
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Volatility and High Thermal Stability in Mid- to Late-First-Row Transition-Metal Diazadienyl Complexes
Knisley, Thomas J, Saly, Mark J, Heeg, Mary Jane, Roberts, John L, Winter, Charles H
Published in Organometallics (26.09.2011)
Published in Organometallics (26.09.2011)
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Journal Article
Volatility and High Thermal Stability in Mid-to-Late First-Row Transition-Metal Complexes Containing 1,2,5-Triazapentadienyl Ligands
Kalutarage, Lakmal C, Heeg, Mary Jane, Martin, Philip D, Saly, Mark J, Kuiper, David S, Winter, Charles H
Published in Inorganic chemistry (04.02.2013)
Published in Inorganic chemistry (04.02.2013)
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Precursor design and reaction mechanisms for the atomic layer deposition of metal films
Bernal Ramos, Karla, Saly, Mark J., Chabal, Yves J.
Published in Coordination chemistry reviews (01.12.2013)
Published in Coordination chemistry reviews (01.12.2013)
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