증발 방법, 증발 장치, 및 증발 소스
MADHAVABHOTLA PRASAD V. S. S. R. V, SALUGU SRINIVAS, LONG MICHAEL, BEVARA NAGA DEEPIKA, THADELA SUDHEER
Year of Publication 13.09.2022
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Year of Publication 13.09.2022
Patent
증발 재료를 증착하기 위한 증착 소스, 증착 장치, 및 이를 위한 방법들
SALUGU SRINIVAS, LOPP ANDREAS, FRANKE SEBASTIAN, AULBACH JULIAN, MUELLER ANDREAS, SCHUESSLER UWE
Year of Publication 28.07.2021
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Year of Publication 28.07.2021
Patent
마스크 디바이스를 핸들링하는 방법들, 마스크 디바이스를 교환하기 위한 장치, 마스크 교환 챔버, 및 진공 시스템
SALUGU SRINIVAS, SAUER ANDREAS, GOVINDASAMY SATHIYAMURTHI, KLEIN WOLFGANG, ZANG SEBASTIAN GUNTHER
Year of Publication 25.07.2019
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Year of Publication 25.07.2019
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캐리어를 정렬하는 방법, 캐리어를 정렬하기 위한 장치, 및 진공 시스템
SALUGU SRINIVAS, SAUER ANDREAS, GOVINDASAMY SATHIYAMURTHI, KLEIN WOLFGANG, ZANG SEBASTIAN GUNTHER
Year of Publication 21.05.2019
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Year of Publication 21.05.2019
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EVAPORATION METHOD, EVAPORATION APPARATUS, AND EVAPORATION SOURCE
LONG, Michael, BEVARA, Naga Deepika, THADELA, Sudheer, MADHAVABHOTLA, Prasad, SALUGU, Srinivas
Year of Publication 15.07.2021
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Year of Publication 15.07.2021
Patent
METHOD OF ALIGNING A CARRIER, APPARATUS FOR ALIGNING A CARRIER, AND VACUUM SYSTEM
GOVINDASAMY, Sathiyamurthi, KLEIN, Wolfgang, ZANG, Sebastian Gunther, SAUER, Andreas, SALUGU, Srinivas
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
Patent
DEPOSITION SOURCE FOR DEPOSITING EVAPORATED MATERIAL, DEPOSITION APPARATUS, AND METHODS THEREFOR
SALUGU SRINIVAS, LOPP ANDREAS, FRANKE SEBASTIAN, SCHUSSLER UWE, AULBACH JULIAN, ANDREAS MOLLER
Year of Publication 04.06.2021
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Year of Publication 04.06.2021
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SYSTEM AND METHOD TO OPERATE SHUTTERS
SALUGU SRINIVAS, LEW KOK-HANN, KULKARNI PRAVIN PRALHAD, ALLADA SUDARSHAN
Year of Publication 29.08.2013
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Year of Publication 29.08.2013
Patent